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Marco Jähnisch
at OFFIS
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Publications (1)
Proceedings Article | 13 October 2006 Paper
Vision feedback in an automatic nanohandling station inside an SEM
Proceedings Volume 6376, 63760B (2006) https://doi.org/10.1117/12.684178
KEYWORDS: Scanning electron microscopy, Image processing, Sensors, Visualization, Volume rendering, Detection and tracking algorithms, Image acquisition, Silicon, Microscopes, Nanowires
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