Dr. Martin Sczyrba
at Advanced Mask Technology Ctr GmbH & Co. KG
SPIE Involvement:
Author
Publications (30)

Proceedings Article | 18 September 2024 Paper
H. Rolff, M. Sczyrba, M. Kristlib
Proceedings Volume 13273, 1327312 (2024) https://doi.org/10.1117/12.3029920
KEYWORDS: Etching, Plasma etching, Nanoimprint lithography, Quartz, Optical gratings, Ion beams, Manufacturing, Metalenses, Chromium, Plasma

Proceedings Article | 26 September 2019 Presentation + Paper
Proceedings Volume 11148, 111480C (2019) https://doi.org/10.1117/12.2539821
KEYWORDS: Critical dimension metrology, Machine learning, Photomasks, Etching, Scanning electron microscopy, Convolution, Semiconductors, Quality measurement, Environmental sensing, Manufacturing

Proceedings Article | 29 August 2019 Paper
Proceedings Volume 11177, 1117709 (2019) https://doi.org/10.1117/12.2535745
KEYWORDS: Machine learning, Data modeling, Critical dimension metrology, Performance modeling, Process control, Visualization, Data centers, Solids, Data processing, Optical inspection

Proceedings Article | 27 June 2019 Paper
Proceedings Volume 11178, 111780L (2019) https://doi.org/10.1117/12.2534978
KEYWORDS: Critical dimension metrology, Machine learning, Data modeling, Process control, Visualization, Data centers, Solids, Detection and tracking algorithms, Data processing, Optical inspection

Proceedings Article | 20 March 2018 Paper
Thomas Thamm, Bernd Geh, Marija Djordjevic Kaufmann, Rolf Seltmann, Alla Bitensky, Martin Sczyrba, Aravind Narayana Samy
Proceedings Volume 10587, 105870F (2018) https://doi.org/10.1117/12.2297382
KEYWORDS: Photomasks, Scanners, Reticles, Light scattering, Scattering, Logic devices, Source mask optimization, Lithography

Showing 5 of 30 publications
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