Dr. Masafumi Fukuto Profile

Dr. Masafumi Fukuto

at Brookhaven National Lab

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Publications (2)

Proceedings Article | 30 April 2023 Presentation

Advancing the capabilities of polymer blend directed self-assembly

Gregory Doerk, Aaron Stein, Suwon Bae, Marcus Noack, Masafumi Fukuto, Ashish Kulkarni, Kristof Toth, Chinedum Osuji, Kevin Yager

Proceedings Volume PC12497, PC124970I (2023) https://doi.org/10.1117/12.2660507

KEYWORDS: Directed self assembly, Polymers, X-rays, X-ray microscopy, Scattering, Scanning electron microscopy, Resolution enhancement technologies, Nanostructures, Lithography, Grazing incidence

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Proceedings Article | 13 March 2018 Presentation + Paper

Critical-dimension grazing incidence small angle x-ray scattering

G. Freychet, D. Kumar, R. Pandolfi, D. Staacks, P. Naulleau, R. J. Kline, D. Sunday , M. Fukuto, J. Strzalka, A. Hexemer

Proceedings Volume 10585, 1058512 (2018) https://doi.org/10.1117/12.2297518

KEYWORDS: X-rays, Scattering, Metrology, Grazing incidence, Nanostructures, Genetic algorithms

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