Mr. Michael De Volder Profile

Michael De Volder

at Univ. of Cambridge

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 25 October 2016 Paper

Paper

Introducing the EUV CNT pellicle

Jae Uk Lee, Johannes Vanpaemel, Ivan Pollentier, Christoph Adelmann, Houman Zahedmanesh, Cedric Huyghebaert, Marina Timmermans, Michael De Volder, Emily Gallagher

Proceedings Volume 9985, 99850C (2016) https://doi.org/10.1117/12.2243019

KEYWORDS: Pellicles, Extreme ultraviolet, Photomasks, Carbon nanotubes, Extreme ultraviolet lithography, Carbon, Scanners, Molybdenum, Finite element methods, Silicon

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Proceedings Article | 20 December 2006 Paper

Paper

A ferrofluid seal technology for fluidic microactuators

M. De Volder, D. Reynaerts

Proceedings Volume 6415, 64150X (2006) https://doi.org/10.1117/12.695524

KEYWORDS: Actuators, Microfluidics, Microactuators, Magnetism, Microsystems, Prototyping, Water, Liquids, Resistance, Sensors

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Proceedings Article | 20 December 2006 Paper

Paper

A fluidic micro-actuator with an integrated inductive position sensor

M. De Volder, J. Coosemans, F. Ceyssens, J. Peirs, R. Puers, D. Reynaerts

Proceedings Volume 6415, 64150F (2006) https://doi.org/10.1117/12.695525

KEYWORDS: Actuators, Position sensors, Sensors, Microfluidics, Microactuators, Control systems, Inductance, Aluminum, Copper, Transformers

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