Dr. Michiel V. P. Kruger Profile

Dr. Michiel V. P. Kruger

Graduate Student

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Publications (1)

Proceedings Article | 16 March 2009 Paper

Enabling process window improvement at 45nm and 32nm with free-form DOE illumination

Tamer Coskun, Apo Sezginer, Vishnu Kamat, Michiel Kruger, Bayram Yenikaya, James Carriere, Jared Stack, Marc Himel

Proceedings Volume 7274, 72740B (2009) https://doi.org/10.1117/12.814215

KEYWORDS: Diffractive optical elements, Photomasks, Manufacturing, Nanoimprint lithography, Source mask optimization, SRAF, Lithographic illumination, Model-based design, Image processing, Lithium

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