CONFERENCE PROCEEDINGS
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Dr. Min Zhao
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (4)
SPIE Journal Paper | 1 May 2008
Design, fabrication, and test of soft x-ray sinusoidal transmission grating
Min Zhao, Xiaoli Zhu, Baoqin Chen, Changqing Xie, Min Liu, Jiebing Niu, Longyu Kuang, Leifeng Cao
OE, Vol. 47, Issue 05, 058001, (May 2008) https://doi.org/10.1117/12.10.1117/1.2919717
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs
Proceedings Article | 4 January 2008 Paper
Fabrication of 200 nm period x-ray transmission gratings using electron beam lithography
Xiaoli Zhu, Changqing Xie, Tianchun Ye, Min Zhao, Jie Ma, Ji Jiang, Jiebin Niu, Ming Liu
Proceedings Volume 6832, 68320V (2008) https://doi.org/10.1117/12.758100
KEYWORDS: X-ray lithography, X-rays, Electron beam lithography, Gold, Electroplating, Polymethylmethacrylate, Photomasks, Silicon, X-ray telescopes, Photoresist processing
Proceedings Article | 21 November 2007 Paper
Fabrication of quantum dot array diffraction grating for soft x-ray spectroscopy
Proceedings Volume 6724, 67241O (2007) https://doi.org/10.1117/12.782916
KEYWORDS: X-rays, Spectroscopy, Diffraction, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, Photomasks, Electron beams, Silicon
Proceedings Article | 21 November 2007 Paper
Analysis of property of HSQ in electron beam lithography
Min Zhao, XiaoLi Zhu, Baoqin Chen, Jiebin Niu, Ming Liu, Changqing Xie
Proceedings Volume 6827, 682728 (2007) https://doi.org/10.1117/12.757739
KEYWORDS: Electron beam lithography, Silicon, Electron beams, Chemical species, Hydrogen, Backscatter, Nanoimprint lithography, Lithography, Nanolithography, Nanostructures
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