Dr. Myunghee Na Profile

Dr. Myunghee Na

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Publications (1)

Proceedings Article | 22 April 2021 Presentation + Paper

Design-technology co-optimization of sequential and monolithic CFET as enabler of technology node beyond 2nm

Bilal Chehab, Julien Ryckaert, Pieter Schuddinck, Pieter Weckx, Naoto Horiguchi, Gioele Mirabelli, Alessio Spessot, Myunghee Na

Proceedings Volume 11614, 116140D (2021) https://doi.org/10.1117/12.2583395

KEYWORDS: Back end of line, Standards development, Metals, Field effect transistors, Multiplexers, Logic, Fin field effect transistors, Dielectrics, Control systems, Clocks

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