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Dr. Nasir Amin
at Government College Univ Faisalabad
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Publications (1)
Proceedings Article | 20 March 2010 Paper
Experimental and numerical investigations on the density profile of CO2 laser-produced Sn plasma for an EUVL source
Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, N. Amin, N. Shaikh, M. Tillack, F. Najmabadi
Proceedings Volume 7636, 76360D (2010) https://doi.org/10.1117/12.848407
KEYWORDS: Carbon dioxide lasers, Plasma, Tin, Pulsed laser operation, Carbon dioxide, Extreme ultraviolet, Extreme ultraviolet lithography, Nd:YAG lasers, Laser beam diagnostics, Absorption
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