o achieve the positioning and multi-degree-of-freedom machining of rotary micro-feature structures on the five- axis motion table in the focused ion beam micro-nano machining system, a high-precision sample rotator based on worm gear drive in vacuum environment is designed. The finite element method is used to simulate and optimize the key components. After loading, the maximum deformation of the component is less than 0.2μm, and the natural frequency is more than 10000Hz, which meet the requirements of the working accuracy and strength of the component. The focused ion beam machining experiment of high aspect ratio microstructure of metal material was carried out by using this sample rotator, and the surface roughness of metal material after machining was better than 5nm. The developed sample rotator expands the processing range of focused ion beam processing system.
With the increasing demand for precision optical components with the complex surface in aerospace, nuclear engineering, medical equipment and other applications, more stringent requirements of smooth surface are put forward for precision polishing. As a non-contact polishing method, abrasive jet water polishing (AWJP) technology carries forward the advantage of micro-abrasive’s collision and erosion that available micro-level removal by low-pressure control. With other unique features like no temperature rising, high flexibility, inexpensiveness and environment-friendly process, AWJP has now become a promising polishing method for ultra-precision free-form surface optical components. In fact, the topography of rough surface affected by abrasive particles cannot be predicted precisely. It is inefficient to continuously adjust the process parameters such as jet velocity, abrasive size and impact angle through experiments to obtain the smoothest polished surface. The impact deformation form irregular abrasives should be controlled in elastic plastic deformation to avoid surface damage caused by brittle fracture. In this paper, the purpose was therefore to establish impacted surface topography model. It can simulate topography of irregular abrasives impacting original rough surface in flow field. First, the model under three-dimensional abrasive impingement was constructed by the dimension reduction method. In other words, impacted surface was simplified to consist of independent elastoplastic elements theoretically. A single abrasive particle impact deformation process was constructed by combining the Popov’s dimension reduction method with Thornton's plastic deformation model. It calculated elastoplastic deformation of a single abrasive’s effect considering abrasive size and surface morphology. The acceleration and impact depth of abrasive were figured up by displacement iteration. The deformation was updated in the current three-dimensional topography of the surface, which as the initial for the next impact calculation. Moreover, abrasive density and velocity distribution were calculated by computer hydrodynamics technology. According to them, the abrasive impact depth in each region was calculated, and then the surface morphology and roughness below the whole jet beam spot are obtained. The applicability of the surface roughness model was verified by AWJP experiments. According to model, the larger tangential velocity of abrasive particle, the smaller impact depth and the larger impact length. Different angles effect on surface topography signally. When it at 90°, the surface topography caused by the velocity stagnation zone was obviously convex, and the polishing morphology is W-shaped. In contrast, 60° presented a single pit appearance and 30° presented a double pit appearance, due to increasing abrasive tangential impact. The surface roughness to be polished by AWJP was reduced from Ra 0.4 um to Ra 0.11 um. In conclusion, a micro impacted surface topography model was established. The theoretical model and experimental results prove flexibility for abrasive jet polishing with variable parameters. Through it we can determine polishing effects of particle size and velocity on rough surfaces, and then the appropriate polishing parameters can be selected. In addition, this model can be used in various abrasive impact machining situations.
KEYWORDS: Ion beams, Optical components, Ions, Chemical species, Thermal effects, Optical surfaces, Monte Carlo methods, Glasses, Sputter deposition, Optical simulations
Ion beam has the advantages of high accuracy and little damage to components, which has been widely used in the figuring of optical components. However, in figuring, the collision between the ions with high-speed collides and the surface of the optical component will cause the temperature of the optical component to rise quickly. In order to investigate the thermal effect of the ion beam figuring, the thermal deposition model is established based on the Sigmund theory of sputtering, and the thermal power density function of the surface heat source is obtained. On this basis, taking BK7 glass as the research object, Monte Carlo method was used to obtain the total power of thermal deposition under the different incidence angle of ion beam. Then the finite element method was used to simulate the thermal effect of the ion beam figuring. The result shows that the deposition energy, maximum temperature and the maximum stress decrease with the increase of incidence angle, and the maximum stress appeared in the clamping position of fixture. The corresponding simulation result shows that comparing with the fixing fixture, the maximum stress in the optical component could be reduced more than 70% by using elastic fixture.
In order to improve the fatigue life of axial piston motor, piston holes were strengthened by inner rolling strengthening process after precision machining. Based on the principle of surface rolling, finite element simulation models of inner rolling and fatigue were established to research mechanism of residual stress and fatigue cycle, respectively. We analyzed the distribution characteristics of residual stress in hole wall and studied the influence law of different rolling process parameters on residual stress. The fatigue life of workpiece with and without residual compressive stress was compared stress life simulation. The results show that the maximum residual compressive stress of 150~210 MPa can be generated after rolling strengthening. The fatigue life was increased by about 21.4% due to residual compressive stress.
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