Dr. Nobuyuki Fukui Profile

Dr. Nobuyuki Fukui

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Publications (3)

Proceedings Article | 10 April 2024 Poster

Latest advances in EUV patterning for preparation of high numerical aperture EUV

Soichiro Okada, Arnaud Dauendorffer, Yuhei Kuwahara, Cong Que Dinh, Ken Ando, Atsushi Tsuboi, Kathleen Nafus, Nobuyuki Fukui, Philippe Foubert, Danilo De Simone

Proceedings Volume 12957, 129571W (2024) https://doi.org/10.1117/12.3010713

KEYWORDS: Extreme ultraviolet, Optical lithography, Etching, Plasma etching, Photoresist materials, Critical dimension metrology, Plasma, Metal oxides, Lithography, High volume manufacturing

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Proceedings Article | 10 April 2024 Presentation + Paper

Pushing the boundaries of random logic metal patterning with low-n EUV single exposure

Syamashree Roy, Arame Thiam, Kaushik Sah, Yannick Feurprier, Nobuyuki Fukui, Kathleen Nafus, Kenichi Miyaguchi, Dieter Van den Heuvel, Balakumar Baskaran, Joost Bekaert, Andrew Cross, Mircea Dusa, Victor Blanco Carballo

Proceedings Volume 12953, 129530X (2024) https://doi.org/10.1117/12.3010868

KEYWORDS: Optical lithography, Semiconducting wafers, Logic, Scanning electron microscopy, Lithography, Design, Extreme ultraviolet

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Proceedings Article | 22 November 2023 Poster

Holistic litho-etch approach towards high NA EUV challenges

Soichiro Okada, Arnaud Dauendorffer, Yuhei Kuwahara, Satoru Shimura, Philippe Foubert, Danilo De Simone, Cong Que Dinh, Ken Ando, Atsushi Tsuboi, Nobuyuki Fukui, Arame Thiam, Yannick Feurprier, Kathleen Nafus

Proceedings Volume PC12750, PC1275011 (2023) https://doi.org/10.1117/12.2687568

KEYWORDS: Extreme ultraviolet, Etching, Plasma etching, Photoresist materials, Optical lithography, Critical dimension metrology, Plasma, Metal oxides, Lithography, High volume manufacturing

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