Dr. Núria Barniol Beumala Profile

Dr. Núria Barniol Beumala

at Univ Autònoma de Barcelona

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 1 July 2005 Paper

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

Maria Villarroya, Jaume Verd, Jordi Teva, Gabriel Abadal, Eduard Figueras, Francesc Perez-Murano, Jaume Esteve, Nuria Barniol

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608354

KEYWORDS: Sensors, Microelectromechanical systems, Transducers, Photomasks, CMOS sensors, Reactive ion etching, Optical lithography, Readout integrated circuits, Integrated circuit design, Integrated circuits

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Proceedings Article | 1 July 2005 Paper

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Jaume Verd, Jordi Teva, Gabriel Abadal, Francesc Perez-Murano, Jaume Esteve, Nuria Barniol

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608462

KEYWORDS: Solid modeling, Microelectromechanical systems, Computer aided design, Data modeling, Device simulation, Systems modeling, Transducers, Sensors, Analog electronics, Performance modeling

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Proceedings Article | 30 June 2005 Paper

Band-pass transimpedance read-out circuit for UHF MEMS resonator applications

Humberto Campanella, Arantxa Uranga, Zachary Davis, Jaume Esteve, Lluis Teres, Nuria Barniol

Proceedings Volume 5837, (2005) https://doi.org/10.1117/12.608331

KEYWORDS: Microelectromechanical systems, Amplifiers, Resonators, Transistors, Integrated circuits, Device simulation, Integrated circuit design, Network security, Readout integrated circuits, CMOS technology

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Proceedings Article | 29 April 2003 Paper

Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

Cristina Martin, Zachary Davis, Esko Forsen, Migdong Dong, Josep Montserrat, Gabriel Abadal, Francesc Perez-Murano, Xavier Borrise, Anja Boisen, Núria Barniol

Proceedings Volume 5118, (2003) https://doi.org/10.1117/12.501262

KEYWORDS: Silicon, Aluminum, Atomic force microscopy, Nanolithography, Nanoelectromechanical systems, Nanostructures, Oxides, Prototyping, Photomasks, Oxidation

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Proceedings Article | 24 April 2003 Paper

SOI silicon as structural layer for NEMS applications

Maria Villarroya, Eduard Figueras, Francesc Perez-Murano, Francesca Campabadal, Jaume Esteve, Nuria Barniol

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499010

KEYWORDS: Silicon, Semiconducting wafers, Oxides, Photomasks, Sensors, Aluminum, Nanoelectromechanical systems, Nanofabrication, Etching, Nanolithography

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Proceedings Article | 24 April 2003 Paper

Resonating cantilever mass sensor with mechanical on-plane excitation

Jordi Teva, Gabriel Abadal, Xavier Jordà, Xavier Borrise, Zachary Davis, Nuria Barniol

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.501339

KEYWORDS: Sensors, Transducers, Field effect transistors, Microelectromechanical systems, Ferroelectric materials, Diodes, Capacitance, Voltage controlled current source, Bridges, Control systems

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Showing 5 of 6 publications

Conference Committee Involvement (1)

Nanotechnology

2 May 2007 | Maspalomas, Gran Canaria, Spain

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