Mr. Pei Liu Profile

Pei Liu

at Shanghai Huali Integrated Circuit Corp

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Author

Publications (2)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

In-line monitoring of overlay and process window using design-assisted voltage contrast inspection for 14nm FINFET technology

Runling Li, I-Kai Hsu, Tomasz Brozek, Linrong Yang, Debiao He, Fangrui Wu, Jiadong Ren, Yefang Zhu, Yan Zhang, Pei Liu, Haiqiong Zhang, Guifeng Zhang, Yingying Fu, Shan Yin, Yujie Jia, Bo Yu

Proceedings Volume 12053, 120531U (2022) https://doi.org/10.1117/12.2613633

KEYWORDS: Lithography, Semiconducting wafers, Process control, Inspection, Fin field effect transistors, Optical alignment

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Proceedings Article | 20 March 2020 Paper

The improvement of measurement accuracy of SADP pitch walking issue

Pei Liu, Cheng-Zhang Wu, Hung-Wen Chao, Wenzhan Zhou, Yu Zhang, Chan-Yuan Hu, Yujie Xu, Jhen-Cyuan Li, Yen-Chan Chiu, Chun-Han Liu, Ran-Fu Yang, Chi-Hung Wang

Proceedings Volume 11325, 113252Z (2020) https://doi.org/10.1117/12.2552057

KEYWORDS: Transmission electron microscopy, Calibration, Semiconducting wafers, Electron microscopes, Fin field effect transistors, Image filtering, Scanning electron microscopy, Etching, Image quality, Integrated circuits, Deep ultraviolet, 193nm lithography, Electro optical systems calibration, Precision measurement, Accuracy assessment

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