Mr. Peter M. Litwin Profile

Peter M. Litwin

at Univ of Virginia

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 9 September 2019 Paper

The effect of growth temperature and metal-to-chalcogen on the growth of WSe2 by molecular beam epitaxy

Peter Litwin, Maria Gabriela Sales, Victoria Nilsson, Prasanna Balachandran, Costel Constantin, Stephen McDonnell

Proceedings Volume 11085, 110850U (2019) https://doi.org/10.1117/12.2530454

KEYWORDS: Selenium, Atomic force microscopy, Thin films, Chemical analysis, Thin film growth, Crystals, Molecular beam epitaxy, Transition metals

Read Abstract +

To further the present understanding of growth conditions on the quality of transition metal dichalcogenide (TMDC) thin films grown by molecular beam epitaxy (MBE), we study the effect of growth temperature and chalcogento- metal flux ratio on the chemical composition and surface morphology of synthesized WSe2 thin films. In-situ X-ray photoelectron spectroscopy (XPS) is performed to analyze the intrinsic chemical composition of the grown material prior to atmospheric exposure and ex-situ atomic force microscopy (AFM) is employed to study the surface morphology of grown, sub-monolayer films. We find that both low and high growth temperature ranges can be detrimental to the chemical homogeneity of the grown material and that these results are echoed in the resulting grain morphology. Growing at 375 °C resulted in the formation of metastable 1T’-WSe₂ alongside the thermodynamically stable 2H phase. Thin films grown at 750 °C resulted in the formation of highly Se deficient material. An intermediate growth temperature of 565 °C produced the most chemically homogeneous films above a critical chalcogen to metal flux ratio of 3250:1. Density functional theory calculations are used to rationalize the insights gained from the measured XPS data. Especially, the influence of Se-vacant WSe_2-x monolayers is explored and its impact on the coordination environment around the Se-atoms is used to interpret the measured XPS data.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years