Dr. Pradeep K. Subrahmanyan Profile

Dr. Pradeep K. Subrahmanyan

Sr. Director at Applied Materials

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Publications (5)

Proceedings Article | 24 March 2016 Paper

Highly sensitive focus monitoring technique based on illumination and target co-optimization

Myungjun Lee, Mark Smith, Pradeep Subrahmanyan, Ady Levy

Proceedings Volume 9778, 977826 (2016) https://doi.org/10.1117/12.2218647

KEYWORDS: Process control, Semiconducting wafers, Metrology, Lithographic illumination, Semiconductor manufacturing, Phase shifts, SRAF, Photomasks, Diffraction, Binary data, Personal protective equipment, Ions, Artificial intelligence

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Proceedings Article | 30 December 2008 Paper

Simultaneous figuring and damage mitigation of optical surfaces

P. Subrahmanyan, K. Pang, T. Yu, R. Salij

Proceedings Volume 7132, 71321R (2008) https://doi.org/10.1117/12.804429

KEYWORDS: Optics manufacturing, Polishing, Surface finishing, Plasma, Precision optics, Chemical species, Atmospheric plasma, Silica, Lead, Glasses

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Proceedings Article | 23 July 2008 Paper

Reactive atom plasma (RAP) processing of mirrors for astronomy

Pradeep Subrahmanyan, George Gardopée

Proceedings Volume 7018, 701809 (2008) https://doi.org/10.1117/12.786991

KEYWORDS: Optics manufacturing, Mirrors, Plasma, Astronomy, Chemical species, Atmospheric plasma, Abrasives, Spatial frequencies, Polishing, Space telescopes

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Proceedings Article | 15 September 2007 Paper

Rapid fabrication of lightweight SiC aspheres using reactive atom plasma (RAP) processing

Pradeep Subrahmanyan, George Gardopee, Yogesh Verma, Ning Li, Tom Yu, Thomas Kyler, Peter Fiske, Philip Sommer

Proceedings Volume 6666, 66660A (2007) https://doi.org/10.1117/12.733123

KEYWORDS: Silicon carbide, Mirrors, Polishing, Aspheric lenses, Chemical species, Plasma, Surface finishing, Ceramics, Abrasives, Manufacturing

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Proceedings Article | 17 October 2003 Paper

Laser micromachining in the microelectronics industry: emerging applications

Pradeep Subrahmanyan

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479555

KEYWORDS: Silicon, Semiconducting wafers, Laser applications, Micromachining, Dielectrics, Absorption, Laser optics, Semiconductor lasers, Microelectronics, Metals

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Conference Committee Involvement (1)

Laser Applications in Microelectronic and Optoelectronic Manufacturing IX

26 January 2004 | San Jose, Ca, United States

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