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Dr. Prateek Mehrotra
Research Scientist
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Author
Publications (3)
Proceedings Article | 13 March 2012 Paper
A solid immersion interference lithography system for imaging ultra-high numerical apertures with high-aspect ratios in photoresist using resonant enhancement from effective gain media
Proceedings Volume 8326, 83260Z (2012) https://doi.org/10.1117/12.916295
KEYWORDS: Prisms, Photoresist materials, Lithography, Dielectrics, Imaging systems, Interfaces, Solids, Reflection, Collimation, Metals
SPIE Journal Paper | 1 July 2011
Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography
JM3, Vol. 10, Issue 03, 033012, (July 2011) https://doi.org/10.1117/12.10.1117/1.3624516
KEYWORDS: Prisms, Plasmonics, Mirrors, Interfaces, Photoresist materials, Lithography, Reflectivity, YAG lasers, Reflection, Sodium
Proceedings Article | 4 April 2011 Paper
Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced high-NA lithography
Proceedings Volume 7970, 79701L (2011) https://doi.org/10.1117/12.879121
KEYWORDS: Prisms, Plasmonics, Interfaces, Mirrors, Lithography, Photoresist materials, Reflectivity, YAG lasers, Reflection, Sodium
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