Dr. Rajesh S. Patel Profile

Dr. Rajesh S. Patel

Consultant at 3RMP LLC

SPIE Involvement:

Author

Publications (17)

Proceedings Article | 21 April 2017 Presentation + Paper

Laser processing of ceramics for microelectronics manufacturing

Robert Sposili, James Bovatsek, Rajesh Patel

Proceedings Volume 10091, 100910X (2017) https://doi.org/10.1117/12.2253159

KEYWORDS: Laser applications, Packaging, Laser ablation, Ceramics, Microelectronics, Laser processing, Manufacturing, Aluminum nitride, Pulsed laser operation, Laser cutting

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Proceedings Article | 14 March 2016 Paper

Laser ablation of borosilicate glass with high power shaped UV nanosecond laser pulses

Philipp von Witzendorff, Andrea Bordin, Oliver Suttmann, Rajesh Patel, James Bovatsek, Ludger Overmeyer

Proceedings Volume 9735, 97350J (2016) https://doi.org/10.1117/12.2209313

KEYWORDS: Laser ablation, Pulsed laser operation, Borosilicate glass, Ultraviolet radiation, High power lasers, Laser processing, Laser cutting, Pulse shaping, Laser sources, Glasses, Laser applications

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Proceedings Article | 9 March 2015 Paper

Micromachining of bio-absorbable stents with ultra-short pulse lasers

F. Hendricks, R. Patel, V. Matylitsky

Proceedings Volume 9355, 935502 (2015) https://doi.org/10.1117/12.2079014

KEYWORDS: Laser cutting, Pulsed laser operation, Femtosecond phenomena, Polymers, Laser ablation, Micromachining, Laser processing, Laser systems engineering, Picosecond phenomena, Amplifiers

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Proceedings Article | 15 March 2013 Paper

High speed micromachining with high power UV laser

Rajesh Patel, James Bovatsek

Proceedings Volume 8608, 86080A (2013) https://doi.org/10.1117/12.2008698

KEYWORDS: Pulsed laser operation, Micromachining, Ultraviolet radiation, Manufacturing, Pulse shaping, Silicon, High power lasers, Diode pumped solid state lasers, Laser applications, Q switched lasers

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Proceedings Article | 23 February 2010 Paper

Highest-speed dicing of thin silicon wafers with nanosecond-pulse 355nm q-switched laser source using line-focus fluence optimization technique

James Bovatsek, Rajesh Patel

Proceedings Volume 7585, 75850K (2010) https://doi.org/10.1117/12.845298

KEYWORDS: Silicon, Semiconducting wafers, Laser cutting, Semiconductor lasers, Pulsed laser operation, Laser processing, Q switched lasers, Wafer dicing, Laser systems engineering, Laser ablation

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Proceedings Article | 24 February 2009 Paper

Effects of pulse duration on the ns-laser pulse induced removal of thin film materials used in photovoltaics

Jim Bovatsek, Ashwini Tamhankar, Raj Patel, Nadezhda Bulgakova, Jörn Bonse

Proceedings Volume 7201, 720116 (2009) https://doi.org/10.1117/12.809842

KEYWORDS: Amorphous silicon, Thin films, Glasses, Thin film solar cells, Pulsed laser operation, Laser damage threshold, Photovoltaics, Solar energy, Solar cells, Thin film devices

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Proceedings Article | 13 March 2008 Paper

High power UV q-switched and mode-locked laser comparisons for industrial processing applications

Michael Kauf, Raj Patel, Jim Bovatsek, Wolfgang Gries

Proceedings Volume 6871, 687123 (2008) https://doi.org/10.1117/12.775238

KEYWORDS: Picosecond phenomena, Mode locking, Laser cutting, Laser processing, Q switched lasers, Ultraviolet radiation, Laser applications, Pulsed laser operation, Silicon, Etching

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Proceedings Article | 20 March 2007 Paper

Processing benefits of high repetition rate and high average power 355 nm laser for micromachining of microelectronics packaging materials

Rajesh Patel, James Bovatsek

Proceedings Volume 6459, 64590H (2007) https://doi.org/10.1117/12.705589

KEYWORDS: Mode locking, Q switched lasers, Laser cutting, Laser processing, Semiconductor lasers, Silicon, Copper, Micromachining, Picosecond phenomena, Microelectronics

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Proceedings Article | 17 October 2003 Paper

New fiber lasers with temporal pulse shaping of nanosecond pulses for tailoring flexible laser material processing

Michelle Stock, Heinrich Endert, Rajesh Patel

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479230

KEYWORDS: Fiber amplifiers, Fiber lasers, Optical amplifiers, Multimode fibers, Laser development, Chromium, Solid state lasers, Silicon, Laser processing, Laser sources

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Proceedings Article | 19 February 2003 Paper

Temporal pulse shaping using fiber laser technology: nanoscaling for flexible industrial laser material processing

Rajesh Patel, Michelle Stock, Zaza Sartania, Jim Bovatsek, Alan Arai, Heinrich Endert

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486528

KEYWORDS: Fiber lasers, Fiber amplifiers, Laser applications, Multimode fibers, Laser development, Pulsed laser operation, Optical amplifiers, Laser marking, Amplifiers, Laser processing

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Proceedings Article | 17 January 2003 Paper

Time-tailored laser pulses: a new approach for laser micromachining and microfabrication processing

Michelle Stock, Heinrich Endert, Rajesh Patel

Proceedings Volume 4984, (2003) https://doi.org/10.1117/12.477843

KEYWORDS: Fiber amplifiers, Semiconductor lasers, Laser processing, Micromachining, Femtosecond phenomena, Laser development, Fiber lasers, Laser applications, Amplifiers, Picosecond phenomena

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Proceedings Article | 25 February 2002 Paper

Novel ultrashort-pulse fiber lasers and their applications

Heinrich Endert, Almantas Galvanauskes, Gregg Sucha, Rajesh Patel

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456810

KEYWORDS: Ultrafast phenomena, Fiber lasers, Laser applications, Pulsed laser operation, Ultrafast lasers, Laser systems engineering, Laser dentistry, Micromachining, Femtosecond phenomena, Solid state lasers

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Proceedings Article | 9 May 1997 Paper

Laser processes for multichip module's high-density multilevel thin film packaging

Rajesh Patel, Thomas Wassick

Proceedings Volume 2991, (1997) https://doi.org/10.1117/12.273739

KEYWORDS: Thin films, Laser ablation, Metals, Laser processing, Laser bonding, Laser applications, Packaging, Dielectrics, Polymers, Computing systems

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Proceedings Article | 12 February 1997 Paper

Mask technology for excimer laser projection ablation

James Speidell, Steven Cordes, Rajesh Patel

Proceedings Volume 3236, (1997) https://doi.org/10.1117/12.301227

KEYWORDS: Photomasks, Laser ablation, Quartz, Dielectrics, Aluminum, Excimer lasers, Etching, Metals, Holography, Laser damage threshold

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Proceedings Article | 27 December 1996 Paper

Low-cost mask for excimer laser projection ablation

James Speidell, Rajesh Patel, Steven Cordes

Proceedings Volume 2884, (1996) https://doi.org/10.1117/12.262824

KEYWORDS: Aluminum, Photomasks, Laser ablation, Quartz, Etching, Excimer lasers, Optical lithography, Dielectrics, Manufacturing, Laser damage threshold

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Proceedings Article | 8 December 1995 Paper

Masks for laser ablation technology: new requirements and challenges

James Speidell, Doris Pulaski, Rajesh Patel

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228190

KEYWORDS: Photomasks, Dielectrics, Laser ablation, Etching, Optical lithography, Chromium, Quartz, Excimer lasers, Laser damage threshold, Wet etching

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Proceedings Article | 8 December 1995 Paper

Quality assurance of dielectric masks for laser ablation technology

Doris Pulaski, Rajesh Patel, James Speidell

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228191

KEYWORDS: Dielectrics, Laser ablation, Photomasks, Inspection, Etching, Chromium, Visible radiation, Reflectivity, Quartz, Opacity

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Showing 5 of 17 publications

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