Mr. Raul A. Ramirez Profile

Raul A. Ramirez

Business Unit Director at Entegris Inc

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Author

Publications (3)

Proceedings Article | 16 April 2011 Paper

Improving material-specific dispense processes for low-defect coatings

Nick Brakensiek, Jennifer Braggin, John Berron, Raul Ramirez, Karl Anderson, Brian Smith

Proceedings Volume 7972, 79722Z (2011) https://doi.org/10.1117/12.879481

KEYWORDS: Semiconducting wafers, Manufacturing, Materials processing, Lithography, Industrial chemicals, Photoresist materials, Photoresist developing, Optical lithography, Bottom antireflective coatings, Wafer testing

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Proceedings Article | 31 March 2010 Paper

Improving material-specific dispense processes for low-defect coatings

Brian Smith, Raul Ramirez, Jennifer Braggin, Aiwen Wu, Karl Anderson, John Berron, Nick Brakensiek, Carlton Washburn

Proceedings Volume 7639, 763929 (2010) https://doi.org/10.1117/12.846642

KEYWORDS: Semiconducting wafers, Particles, Liquids, Manufacturing, Materials processing, Data modeling, Lithography, Intelligence systems, Product engineering, Process engineering

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Proceedings Article | 31 March 2010 Paper

Defect performance of a 2X node resist with a revolutionary point-of-use filter

J. Braggin, R. Ramirez, A. Wu, W. Choi, I. Funahshi, K. Yamamoto

Proceedings Volume 7639, 76391E (2010) https://doi.org/10.1117/12.859280

KEYWORDS: Manufacturing, Lithography, Semiconducting wafers, Chemistry, Control systems, Immersion lithography, Manufacturing equipment, Filtering (signal processing), Scanning electron microscopy, Photomicroscopy

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