Mr. Sam Yuspeh Profile

Sam Yuspeh

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Publications (4)

Proceedings Article | 8 April 2011 Paper

Investigation on the interaction of long duration Nd:YAG laser pulse with Sn plasma for an EUV metrology source

Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, M. Tillack, F. Najmabadi

Proceedings Volume 7969, 796930 (2011) https://doi.org/10.1117/12.881223

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, Nd:YAG lasers, Tin, Ions, Metrology, Extreme ultraviolet lithography, Laser energy, Carbon dioxide lasers

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Proceedings Article | 20 March 2010 Paper

Experimental and numerical investigations on the density profile of CO2 laser-produced Sn plasma for an EUVL source

Y. Tao, Y. Ueno, S. Yuspeh, R. Burdt, N. Amin, N. Shaikh, M. Tillack, F. Najmabadi

Proceedings Volume 7636, 76360D (2010) https://doi.org/10.1117/12.848407

KEYWORDS: Carbon dioxide lasers, Plasma, Tin, Pulsed laser operation, Carbon dioxide, Extreme ultraviolet, Extreme ultraviolet lithography, Nd:YAG lasers, Laser beam diagnostics, Absorption

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Proceedings Article | 18 March 2009 Paper

Ablation depth in planar Sn targets during the interaction with a Nd:YAG laser for extreme ultraviolet lithography

Russell Burdt, Sam Yuspeh, Kevin Sequoia, Mark Tillack, Yezheng Tao, Farrokh Najmabadi

Proceedings Volume 7271, 72712Z (2009) https://doi.org/10.1117/12.814233

KEYWORDS: Laser ablation, Ions, Tin, Extreme ultraviolet, Silicon, Plasma, Extreme ultraviolet lithography, Spectroscopy, Pulsed laser operation, Diagnostics

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Proceedings Article | 18 March 2009 Paper

Effects of the ratio of sphere size to laser focal spot on the dominant in-band EUV emitting region

Sam Yuspeh, Kevin Sequoia, Yezheng Tao, Mark Tillack, Russell Burdt, Farrokh Najmabadi

Proceedings Volume 7271, 727136 (2009) https://doi.org/10.1117/12.814167

KEYWORDS: Plasmas, Extreme ultraviolet, Optical spheres, Absorption, Tin, Extreme ultraviolet lithography, Diagnostics, Performance modeling, Temperature metrology, Laser beam diagnostics

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