Ms. Sayuri Tanaka Profile

Sayuri Tanaka

at Nikon Corp

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Absolute coordinate system adjustment and calibration by using standalone alignment metrology system

Satoshi Ando, Haruki Saito, Sayuri Tanaka, Tetsuya Kawata, Takanobu Okamoto, Katsushi Makino, Yuji Shiba, Takehisa Yahiro, Jun Ishikawa, Masahiro Morita

Proceedings Volume 11611, 116112S (2021) https://doi.org/10.1117/12.2583695

KEYWORDS: Optical alignment, Metrology, Lithography, Calibration, Distortion, Semiconducting wafers, Overlay metrology, Scanners

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Proceedings Article | 26 March 2019 Paper

Standalone alignment technology enabling feed-forward compensation of on-product overlay errors

Takehisa Yahiro, Junpei Sawamura, Sonyong Song, Sayuri Tanaka, Yuji Shiba, Satoshi Ando, Hiroyuki Nagayoshi, Jun Ishikawa, Masahiro Morita, Yuichi Shibazaki

Proceedings Volume 10959, 1095908 (2019) https://doi.org/10.1117/12.2514777

KEYWORDS: Optical alignment, Semiconducting wafers, Optical parametric oscillators, Scanners, Distortion, Sensors, Metrology, Wafer testing, Sensing systems, Overlay metrology

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