Mr. Scot Smith Profile

Scot Smith

Scientist

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Publications (2)

Proceedings Article | 14 September 2001 Paper

Challenges of laser spectrum metrology in 248- and 193-nm lithography

Alexander Ershov, Scot Smith

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435657

KEYWORDS: Fabry–Perot interferometers, Spectroscopy, Monochromators, Laser metrology, Metrology, Integration, Diffusers, Diffraction gratings, Mirrors, Lithography

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Proceedings Article | 5 July 2000 Paper

Performance of very high repetition rate ArF lasers

Jean-Marc Hueber, Herve Besaucele, Palash Das, Rick Eis, Alexander Ershov, Vladimir Fleurov, Dmitri Gaidarenko, Thomas Hofmann, Paul Melcher, William Partlo, Bernard Nikolaus, Scot Smith, Kyle Webb

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388979

KEYWORDS: Laser applications, Laser scanners, 3D scanning, Laser development, Pulsed laser operation, Semiconducting wafers, Laser optics, Laser stabilization, Fabry–Perot interferometers, Manufacturing

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