Mr. Scott DeVries Profile

Scott DeVries

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Process trace analytics for process development

Robert Baseman, Fateh Tipu, Sebastian Englemann, John Papalia, Matthew Sagianis, Scott DeVries, Danielle Durrant, Sebastian Naczas, Vinay Pai, Shanti Pancharatnam

Proceedings Volume 11615, 116150J (2021) https://doi.org/10.1117/12.2583645

KEYWORDS: Analytics, Data processing, Sensors, Semiconducting wafers, Process control, Manufacturing, Time metrology, Statistical analysis, Semiconductor manufacturing, Metrology

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Proceedings Article | 16 October 2017 Presentation + Paper

Development of amorphous silicon based EUV hardmasks through physical vapor deposition

Anuja De Silva, Yann Mignot, Luciana Meli, Scott DeVries, Yongan Xu, Indira Seshadri, Nelson Felix, Wilson Zeng, Yong Cao, Khoi Phan, Huixiong Dai, Christopher Ngai, Michael Stolfi, Daniel Diehl

Proceedings Volume 10450, 104501A (2017) https://doi.org/10.1117/12.2280607

KEYWORDS: Amorphous silicon, Optical lithography, Etching, Photoresist materials, Silicon, Head-mounted displays, Silicon films, Chemical vapor deposition, Extreme ultraviolet, Physical vapor deposition

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