Dr. Sean G. Reidy Profile

Dr. Sean G. Reidy

Sr. Manager Technology & Integration at GLOBALFOUNDRIES Inc

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Publications (2)

Proceedings Article | 13 March 2018 Presentation + Paper

Thick photosensitive polyimide film side wall angle variability and scum improvement for IC packaging stress control

Sohan Singh Mehta, Marco Yeung, Fahad Mirza, Thiagarajan Raman, Travis Longenbach, Justin Morgan, Mark Duggan, Rio Soedibyo, Sean Reidy, Mohamed Rabie, Jae Kyu Cho, C. Premachandran, Danish Faruqui

Proceedings Volume 10586, 1058612 (2018) https://doi.org/10.1117/12.2297360

KEYWORDS: Back end of line, Packaging, Copper, Silicon, Modulation, Semiconducting wafers, 3D modeling, Finite element methods, Reliability, Metals

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Proceedings Article | 28 March 2017 Presentation + Paper

High-throughput electrical characterization for robust overlay lithography control

Devender Devender, Xumin Shen, Mark Duggan, Sunil Singh, Jonathan Rullan, Jae Choo, Sohan Mehta, Teck Jung Tang, Sean Reidy, Jonathan Holt, Hyung Woo Kim, Robert Fox, D. K. Sohn

Proceedings Volume 10145, 101450K (2017) https://doi.org/10.1117/12.2260707

KEYWORDS: Overlay metrology, Back end of line, Process control, Lithography, Semiconductors, Semiconductor manufacturing, Resistance, Reliability, Photomasks, Image processing, Metals, Optical lithography

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