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Dr. Senta L. Jantzen
Optics Design Engineer at ASML Netherlands BV
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Publications (1)
Proceedings Article | 5 March 2021 Presentation
Tunable index silicon nitride for CMOS photonics applications
Frederic Gardes, Thalía Domínguez Bucio, Lorenzo Mastronardi, Greta De Paoli, Senta Jantzen, Ilias Skandalos, Milan Milosevic, Valerio Vitali, Joaquin Faneca, Periklis Petropoulos, Francisco Jurado Romero, José Manuel Luque-González, Iñigo Molina-Fernández, Robert Halir, Alejandro Ortega-Moñux, J. G. Wangüemert-Pérez, Daniele Melati, Jens Schmid, Pavel Cheben
Proceedings Volume 11689, 1168916 (2021) https://doi.org/10.1117/12.2578387
KEYWORDS: Silicon, Refractive index, Photonics, Waveguides, Absorption, Wave propagation, Ultraviolet radiation, Tolerancing, Scattering, Polarization
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