Low threshold, continuous wavelength tuning micro-electro-mechanically system (MEMS) tunable
vertical-cavity surface-emitting lasers (VCSELs) operating at 980 nm are demonstrated. The device utilizes the
two-chip concept with a MEMS membrane mirror suspended by an air gap above a VCSEL amplifier. Output
power of 4.56 mW with 14μm diameter oxide aperture in continuous operation and tuning range of 6.8nm are
obtained. Due to the low optical loss in resonance cavity results in threshold current as low as 0.6 mA at room
temperature. Theoretical calculation for the threshold gain as a function of the wavelength and air gap is obtained
respectively, which provides the design strategies to improve device performance.
Based on the band gap theory, a dual-wavelength VCSELs with same direction, equal-intensity,
high-Q program is presented. The wavelengths of the VCSEL can be located with the aid of the
Al0.8Ga0.2As defect layer in 1D photonic crystal structure. The results indicated that
one-dimensional PC with a sheet of defect layer provides a parent structure on which laser beam
can be well engineered without the expense of the macroscopic structural integrity.
For developing the tunable performance and stability, we present a widely tunable 850nm-range VCSEL structure based on the voltage-dependent birefringence of liquid crystal. An intracavity liquid crystal layer is imbedded between the top DBR (Distributed Bragg Reflector) and the Half VCSEL as an electro-optic index modulator. An Al0.98Ga0.02As oxidization layer was grown above the active region for current and optical confinement. By the calculation, we found tuning efficiency increased after thickening the liquid crystal layer. However, the optical loss in resonance cavity also increased simultaneously. For compromise, we got that 1837nm is the most suitable thickness. And the tuning efficiency is obviously larger than the electrostatic method. Then, we calculated the electric field intensity distribution, the gain characteristics of GaAs/Al0.3Ga0.7 As quantum wells and the threshold features when thickness of liquid crystal layer is 1837nm. By analyzing these results, tuning efficiency of 5.4nm/V and 15nm tuning range are obtained at last. Our study could provide insight into tunable VCSELs design and optimization.
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