Mr. Shijie Zhao Profile

Shijie Zhao

at China Academy of Engineering Physics

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Author

Publications (9)

Proceedings Article | 6 February 2019 Paper

Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding

L. Zhou, Q. Wei, S. Zhao, Q. Zhang, J. Wang, Q. Xu

Proceedings Volume 10842, 108420V (2019) https://doi.org/10.1117/12.2504960

KEYWORDS: Aspheric lenses, Computer programming, Computing systems, Aspheric optics, Human-machine interfaces

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Proceedings Article | 30 January 2019 Paper

Recent advances in rapid polishing process of large aperture optical flats

Ruiqing Xie, Shijie Zhao, Defeng Liao, Xianhua Chen, Jian Wang, Qiao Xu, Huiying Zhao, Zhuangde Jiang

Proceedings Volume 10841, 108410V (2019) https://doi.org/10.1117/12.2505131

KEYWORDS: Polishing, Surface finishing, Optical components, Silica, Surface roughness, Optics manufacturing, Chemical mechanical planarization, Polyurethane, Particles, High power lasers

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Proceedings Article | 16 January 2019 Paper

A novel method for measuring and correcting the surface shape error of the pitch lap in the full-aperture continuous polishing

Defeng Liao, Ruiqing Xie, Shijie Zhao, Lele Ren, Yiren Wang

Proceedings Volume 10838, 108381A (2019) https://doi.org/10.1117/12.2505902

KEYWORDS: Polishing, Surface finishing, Optical components, Servomechanisms, Polyurethane, Sensors, Diamond, Abrasives, Process control, Motion measurement

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Proceedings Article | 16 January 2019 Paper

Investigation on the compression behavior of polishing lap in continuous polishing

Lele Ren, Feihu Zhang, Defeng Liao, Ruiqing Xie, Shijie Zhao

Proceedings Volume 10838, 108380J (2019) https://doi.org/10.1117/12.2504925

KEYWORDS: Polishing, Interfaces, Computer simulations, Analytical research, Sensors, Photovoltaics, Surface finishing, Mechanics, Mechatronics, Laser welding

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SPIE Journal Paper | 17 September 2018

Improvement and application of pad conditioning accuracy in chemical mechanical polishing

Xinxing Ban, Huiying Zhao, Xueliang Zhu, Shijie Zhao, Ruiqing Xie, Defeng Liao

OE, Vol. 57, Issue 09, 095102, (September 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.9.095102

KEYWORDS: Polishing, Surface finishing, Chemical mechanical planarization, Diamond, Particles, Optical engineering, Optics manufacturing, Polyurethane, Semiconducting wafers, Silica

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Proceedings Article | 5 March 2018 Paper

Research on high-efficiency polishing technology of photomask substrate

Shijie Zhao, Ruiqing Xie, Lian Zhou, Defeng Liao, Xianhua Chen, Jian Wang

Proceedings Volume 10710, 107102O (2018) https://doi.org/10.1117/12.2314931

KEYWORDS: Polishing, Surface finishing, Photomasks, Glasses, Sensors, Manufacturing, Annealing, Active sensors, Silicon, Diamond

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Proceedings Article | 5 March 2018 Paper

In-situ shape measurement technology during large aperture optical planar continuous polishing process

Ruiqing Xie, Defeng Liao, Jian Chen, Shijie Zhao, Xianhua Chen, Baojian Ji, Jian Wang, Qiao Xu

Proceedings Volume 10710, 1071033 (2018) https://doi.org/10.1117/12.2317629

KEYWORDS: Polishing, Surface finishing, Interferometry, Optics manufacturing, Optical components, Mirrors, Sensors, Interferometers, 3D metrology, Mechanics

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Proceedings Article | 5 March 2018 Paper

Improving material removal determinacy based on the compensation of tool influence function

Bo Zhong, Xian-hua Chen, Wen-hui Deng, Shi-jie Zhao, Nan Zheng

Proceedings Volume 10710, 107102P (2018) https://doi.org/10.1117/12.2314935

KEYWORDS: Polishing, Surface finishing, Photovoltaics, Optical components, Convolution, Physics, Electronic components, Error analysis, Computer simulations, Head

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SPIE Journal Paper | 9 January 2018

Design of an ultraprecision computerized numerical control chemical mechanical polishing machine and its implementation

Chupeng Zhang, Huiying Zhao, Xueliang Zhu, Shijie Zhao, Chunye Jiang

OE, Vol. 57, Issue 01, 015104, (January 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.1.015104

KEYWORDS: Polishing, Chemical mechanical planarization, Tin, Error analysis, Surface finishing, Sensors, Kinematics, Particles, Diamond, Control systems design

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Showing 5 of 9 publications

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