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Shiyang Li
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Publications (1)
Proceedings Article | 18 December 2023 Paper
Interference lithography based on a phase mask for the fabrication of diffraction gratings
Shuhu Huan, Manman Sun, Shiyang Li, Ying Liu, Yilin Hong
Proceedings Volume 12964, 129640D (2023) https://doi.org/10.1117/12.3006776
KEYWORDS: Lithography, Diffraction gratings, Fabrication, Diffraction, Etching, Photoresist materials, Reactive ion etching, Near field, Silica, Plane waves
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