Dr. Shu Huei Hou Profile

Dr. Shu Huei Hou

at United Microelectronics Corp

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Publications (2)

Proceedings Article | 15 April 2008 Paper

Reflection control for immersion lithography at 45/32-nm nodes

Wan-Ju Tseng, Ruei-Hung Hsu, Shu Huei Hou, Tzu-Huai Tseng, Bill Lin, Chun Chi Yu, Sue Ryeon Kim, Jeong Yun Yu, Gerald Wayton, Maurizio Ciambra, Suzanne Coley, David Praseuth, Nick Pugliano

Proceedings Volume 6923, 69232Z (2008) https://doi.org/10.1117/12.776671

KEYWORDS: Metals, Lithography, Reflectivity, Optical lithography, Line width roughness, Immersion lithography, Reflection, Logic devices, Critical dimension metrology, Etching

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Proceedings Article | 7 March 2008 Paper

Improvement of the common DoF across field for hole-structure process layers

Shu Huei Hou, Edgar Huang, Aroma Tseng, Met Yeh, Bill Lin, Chun Chi Yu, Eason Lin

Proceedings Volume 6924, 692434 (2008) https://doi.org/10.1117/12.772171

KEYWORDS: Semiconducting wafers, Sensors, Picosecond phenomena, Wafer-level optics, Finite element methods, Optical sensors, Back end of line, Critical dimension metrology, Scanners, Lithography

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