Dr. Shujie Liu Profile

Dr. Shujie Liu

Associate Professor at Dalian University of Technology

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Publications (1)

Proceedings Article | 6 December 2005 Paper

Profile measurement of resist surface using multi-ball-cantilever AFM

S. Liu, S. Nagasawa, S. Takahashi, K. Takamasu

Proceedings Volume 6049, 604903 (2005) https://doi.org/10.1117/12.647962

KEYWORDS: Atomic force microscopy, Finite element methods, Thin films, Diamond, Interferometers, Chemical elements, Actuators, Semiconductors, Photoresist processing, Semiconductor materials

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