Ms. Shuxin Li Profile

Shuxin Li

Chief Engineer at Shanghai Micro Electronics Equipment Co Ltd

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Publications (3)

Proceedings Article | 18 April 2013 Paper

A novel focus monitoring technique using Iso-Dense overlay mark

S.X. Li, J.R. Cheng, A. Bourov, G. Sun

Proceedings Volume 8681, 86811H (2013) https://doi.org/10.1117/12.2011422

KEYWORDS: Semiconducting wafers, Binary data, Photomasks, Scanners, Overlay metrology, Lithography, Phase shifts, Reticles, Critical dimension metrology, Process control

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Proceedings Article | 13 March 2012 Paper

The overlay performance optimization based on overlay manager system

G. Sun, J. Zhu, S. X. Li, F. L. Mao, L. F. Duan

Proceedings Volume 8326, 832625 (2012) https://doi.org/10.1117/12.916283

KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Optical alignment, Source mask optimization, Data modeling, Control systems, Software development, Time metrology, Process control

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Proceedings Article | 21 August 2009 Paper

Effects of oxygen on structural, morphological, and optical properties of sputtered ZnO films on glass substrate

Y. Liao, Sh. X. Li, J. Zhang, H. Zhang, X. Li, Z. Guo

Proceedings Volume 7404, 74040D (2009) https://doi.org/10.1117/12.824513

KEYWORDS: Zinc oxide, Crystals, Oxygen, Glasses, Sputter deposition, Optical properties, Thin films, Atomic force microscopy, Transmittance, Argon

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