Dr. Stefanie Girol-Gunia Profile

Dr. Stefanie Girol-Gunia

at AMD Saxony LLC & Co KG

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Publications (3)

Proceedings Article | 24 March 2008 Paper

Automated creation of production metrology recipes based on design information

Jason Cain, Mark Threefoot, Kishan Shah, Bernd Schulz, Stefanie Girol-Gunia, Jon-Tobias Hoeft

Proceedings Volume 6922, 69221J (2008) https://doi.org/10.1117/12.773407

KEYWORDS: Metrology, Overlay metrology, Pattern recognition, Semiconducting wafers, Detection and tracking algorithms, Scatterometry, Time metrology, Target recognition, Databases, Optical alignment

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Proceedings Article | 24 March 2008 Paper

Automatic CD-SEM offline recipe creation in a high volume production fab

Stefanie Girol-Gunia, Stefan Roling, Ovadya Menadeva, Dan Levitzky, Adi Costa, Daniel Fischer

Proceedings Volume 6922, 69221U (2008) https://doi.org/10.1117/12.774757

KEYWORDS: Pattern recognition, Semiconducting wafers, Optical proximity correction, Computer aided design, Metrology, Target recognition, Metals, Optical alignment, Atrial fibrillation, Process control

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Proceedings Article | 22 March 2008 Paper

Using in-chip overlay metrology

Stefanie Girol-Gunia, Bernd Schulz, Nigel Smith, Lewis Binns

Proceedings Volume 6922, 69220N (2008) https://doi.org/10.1117/12.774507

KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Data modeling, Wafer-level optics, Optical testing, Process control, Photomasks, Etching, Scanners

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