Mr. Sunpyo S. Lee Profile

Sunpyo S. Lee

at SAMUNG Electronics Co Ltd.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 8 October 2014 Paper

Study of high sensitivity DUV inspection for sub-20nm devices with complex OPCs

Sang Hoon Han, Hong Yul Jung, Sun Pyo Lee, In-Yong Kang, Gi Sung Yoon, Dong Hoon Chung, Chan-Uk Jeon, Yulia Brand, Yair Eran, Yoad Bar-Shean, Alexander Chereshnya, Chung Ki Lyu

Proceedings Volume 9235, 92351K (2014) https://doi.org/10.1117/12.2076308

KEYWORDS: Inspection, SRAF, Photomasks, Artificial intelligence, Optical proximity correction, Evolutionary algorithms, Resolution enhancement technologies, Image resolution, Optical lithography, Source mask optimization

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Proceedings Article | 23 March 2009 Paper

Requirements of the inspection for double patterning technology reticles

Wonil Cho, Won-Sun Kim, Sung-Joon Sohn, Sunpyo Lee, Jihyeon Choi, Yonghoon Kim, HanKu Cho

Proceedings Volume 7272, 72721T (2009) https://doi.org/10.1117/12.814101

KEYWORDS: Inspection, Reticles, Double patterning technology, Defect detection, Critical dimension metrology, Ear, Semiconducting wafers, Photomasks, Defect inspection, Radon

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