Susan Schima
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 February 2020 Presentation + Paper
Douglas Bopp, Ellyse Taylor, Khoa Le, Susan Schima, Matthew Hummon, John Kitching
Proceedings Volume 11296, 112961O (2020) https://doi.org/10.1117/12.2552585
KEYWORDS: Rubidium, Chemical species, Semiconducting wafers, Silicon, Microfabrication, Optical resonators, Oxides, Spectroscopy, Glasses, Deep reactive ion etching

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