Mr. Takashi Nobuhara Profile

Takashi Nobuhara

at Hitachi High-Tech Corp

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Author

Publications (2)

SPIE Journal Paper | 31 October 2023 Open Access

In situ electrical property quantification of memory devices by modulated electron microscopy

Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa

JM3, Vol. 22, Issue 04, 041605, (October 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041605

KEYWORDS: Modulation, Electron microscopy, Semiconducting wafers, Scanning electron microscopy, Electrical properties, Inspection, Defect detection, Scanning probe microscopy, Manufacturing, Defect inspection

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Proceedings Article | 27 April 2023 Presentation + Paper

In-situ electrical property quantification of memory devices by modulated electron microscopy

Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa

Proceedings Volume 12496, 124961O (2023) https://doi.org/10.1117/12.2658250

KEYWORDS: Modulation, Electron microscopy, Semiconducting wafers, Inspection, Defect detection, Scanning electron microscopy, Scanning probe microscopy, Electrical properties, Manufacturing, Nanometer integrated circuits, Semiconductor characterization

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