Dr. Tatsuya Shinozaki Profile

Dr. Tatsuya Shinozaki

at Megaopto Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 17 February 2010 Paper

Highly reliable 198-nm light source for semiconductor inspection based on dual fiber lasers

Shinichi Imai, Kazuto Matsuki, Nobutaka Kikuiri, Katsuhiko Takayama, Osamu Iwase, Yoshiharu Urata, Tatsuya Shinozaki, Yoshio Wada, Satoshi Wada

Proceedings Volume 7580, 75800H (2010) https://doi.org/10.1117/12.840467

KEYWORDS: Light sources, Inspection, Fiber lasers, Fiber amplifiers, Photomasks, Optical amplifiers, Semiconductors, Pulsed laser operation, Oscillators

Read Abstract +

Proceedings Article | 22 February 2006 Paper

Continuous-wave visible laser by intracavity-doubled fiber laser

Tatsuya Shinozaki, Yushi Kaneda, Yoshiharu Urata, Satoshi Wada

Proceedings Volume 6100, 610003 (2006) https://doi.org/10.1117/12.649522

KEYWORDS: Fiber lasers, Fiber Bragg gratings, Mirrors, Laser resonators, Semiconductor lasers, Resonators, Continuous wave operation, Second-harmonic generation, Reflectors, Ytterbium

Read Abstract +

Proceedings Article | 6 November 2000 Paper

Optical emission of plasmas in ultraviolet and infrared laser ablation of graphite by time-resolved spectroscopy

Tatsuya Shinozaki, Toshihiko Ooie, Tetsuo Yano, Masafumi Yoneda

Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405761

KEYWORDS: Carbon, Excimer lasers, Ultraviolet radiation, Neodymium, Pulsed laser operation, Plasmas, YAG lasers, Infrared lasers, Laser ablation, UV optics

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years