Mr. Timothy J. Litvin Profile

Timothy J. Litvin

President at Kimokeo Inc

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Publications (2)

Proceedings Article | 26 March 2007 Paper

A solid-state 193-nm laser with high spatial coherence for sub-40-nm interferometric immersion lithography

Andrew Merriam, Donald Bethune, John Hoffnagle, William Hinsberg, C. Michael Jefferson, James Jacob, Timothy Litvin

Proceedings Volume 6520, 65202Z (2007) https://doi.org/10.1117/12.712210

KEYWORDS: Semiconducting wafers, Interferometry, Visibility, Solid state lasers, Immersion lithography, Laser sources, Photoresist materials, Prisms, Interferometers, Lithography

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Proceedings Article | 16 July 2002 Paper

High-resolution photomask transmission and phase measurement tool

Jim Jacob, Tim Litvin, Andrew Merriam

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473409

KEYWORDS: Photomasks, Phase measurement, Phase shifts, Transmittance, Cameras, Laser beam diagnostics, Objectives, Attenuators, Binary data, Light sources

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