Mr. Tobias B. Gräf Profile

Tobias B. Gräf

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Proceedings Article | 2 March 2022 Presentation + Paper

A 3D scanner: low footprint piezoelectric tunable optical scanner

Hitesh G. B. Gowda, Tobias Gräf, Ulrike Wallrabe

Proceedings Volume 12013, 120130D (2022) https://doi.org/10.1117/12.2605917

KEYWORDS: Actuators, Glasses, Prisms, Silicon, 3D scanning, Imaging systems, Polyurethane, Polymers, Optical spheres, Materials processing

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We present a unique approach for 3D scanners using a single optomechanical component, the tunable prism-lens. We cointegrated piezoelectric actuators with a fluid chamber bounded by a movable glass window at the top and a flexible membrane at the bottom. We assembled the four bending actuators in perpendicular orientation to achieve a small footprint and attached their free ends to the top glass window with thin beam plates. Thereby, we gain a large clear aperture of 18 mm at a small footprint of only 20x20x2.5 mm3 . The actuators can independently pull or push the glass window at the four corners, leading to a fluid displacement and correspondingly deforming the membrane. A symmetric actuation of all the actuators results in a lens effect, with a tunable focal power range of + 12.5 dpt to -10.5 dpt at a response time of 3.5 ms. Conversely, asymmetric actuation results in a prism effect, with a tunable bi-directional scan angle of ± 1.5° at a response time of 2 ms. Hence, both modes can be combined to achieve a 3-dimensional scan by selective actuation. Our unique single component 3D scanner reduces the size and complexity compared to a conventional mirror-lens setup. In the paper, we present the design, fabrication process, analytical model, and optomechanical characterization.

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