Prof. Toh-Ming Lu Profile

Prof. Toh-Ming Lu

at Rensselaer Polytechnic Institute

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Author

Publications (10)

Proceedings Article | 1 April 2013 Paper

Development of 3D Monte Carlo simulations for predicting multilayer geometry of pit-type EUV defects

Robert Spivey, Ranganath Teki, T.-M. Lu

Proceedings Volume 8679, 86791W (2013) https://doi.org/10.1117/12.2011156

KEYWORDS: Monte Carlo methods, Particles, Extreme ultraviolet, Multilayers, Scanning transmission electron microscopy, Atomic force microscopy, Extreme ultraviolet lithography, Optical simulations, 3D modeling, Photomasks

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Proceedings Article | 10 September 2008 Paper

Shadowing growth of biaxially textured nanostructured films

Toh-Ming Lu, Fu Tang, Gwo-Ching Wang

Proceedings Volume 7041, 704107 (2008) https://doi.org/10.1117/12.794217

KEYWORDS: Crystals, Diffraction, X-rays, Nanostructuring, Sensors, Reflection, Chemical species, Diffusion, Thin films, Nanorods

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Proceedings Article | 31 March 2006 Paper

Hydrogen generation using ruthenium nano-rod array electrodes

Seongyul Kim, Tansel Karabacak, Toh-Ming Lu, Nikhil Koratkar

Proceedings Volume 6172, 61720B (2006) https://doi.org/10.1117/12.658786

KEYWORDS: Electrodes, Ruthenium, Hydrogen, Nanostructuring, Nanostructures, Hydrogen production, Nanolithography, Nickel, Resistance, Nanorods

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Proceedings Article | 16 May 2005 Paper

Nanostructured electrodes for efficient gas ionization

J. Singh, Toh-Ming Lu, Gwo-Ching Wang, Nikhil Koratkar

Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.594571

KEYWORDS: Ionization, Argon, Electrodes, Ions, Silver, Nanostructuring, Tungsten, Chemical species, Gases, Nanorods

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Proceedings Article | 27 October 2003 Paper

Designing nanostructures by glancing angle deposition

Yiping Zhao, Dexian Ye, Gwo-Ching Wang, Toh-Ming Lu

Proceedings Volume 5219, (2003) https://doi.org/10.1117/12.505253

KEYWORDS: Nanostructures, Nanolithography, Silicon, Scanning electron microscopy, Particles, Fabrication, Multilayers, Thin films, Nanorods, Nanowires

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Proceedings Article | 6 October 2003 Open Access

Educational and training program of THz Science and Technology at Rensselaer

G.-C. Wang, T.-M. Lu, M. Shur, S. Kalyanaraman, X.-C. Zhang

Proceedings Volume 9663, 96630O (2003) https://doi.org/10.1117/12.2207353

KEYWORDS: Terahertz radiation, Imaging spectroscopy, Foam, Electronics, Spectroscopy, Plasma, Physics, Molecular electronics, Tomography, Defect detection

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Proceedings Article | 21 November 2001 Paper

Thin film characterization using terahertz differential time-domain spectroscopy and double modulation

Samuel Mickan, Kwang-Su Lee, Toh-Ming Lu, Edward Barnat, Jesper Munch, Derek Abbott, Xi-Cheng Zhang

Proceedings Volume 4591, (2001) https://doi.org/10.1117/12.449149

KEYWORDS: Terahertz radiation, Modulation, Thin films, Refractive index, Spectroscopy, Signal to noise ratio, Terahertz spectroscopy, Dielectrics, Electro optical modeling, Silicon

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Proceedings Article | 25 October 1999 Paper

Surface etch-front morphologies using in-plane light scattering

Yiping Zhao, G. Wang, Toh-Ming Lu

Proceedings Volume 3784, (1999) https://doi.org/10.1117/12.366715

KEYWORDS: Light scattering, Diffraction, Sensors, Scattering, Atomic force microscopy, Silicon, Etching, Diodes, Interfaces, Aluminum

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Proceedings Article | 21 May 1993 Paper

Parylene as a conformal insulator for submicron multilayer interconnection

Xin Zhang, S. Dabral, B. Howard, Joseph Bica, Chien Chiang, V. Ochoa, P. Ficalora, Christoph Steinbruchel, H. Bakhru, Toh-Ming Lu, John McDonald

Proceedings Volume 1805, (1993) https://doi.org/10.1117/12.145463

KEYWORDS: Etching, Aluminum, Coating, Dielectrics, Reactive ion etching, Metals, Polymers, Diffusion, Copper, Multilayers

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Proceedings Article | 1 April 1991 Paper

Photonic Multichip Packaging (PMP) using electro-optic organic materials and devices

John McDonald, Nickolas Vlannes, Toh-Ming Lu, Gary Wnek, Theodore Nason, Lu You

Proceedings Volume 1390, (1991) https://doi.org/10.1117/12.25584

KEYWORDS: Packaging, Electro optics, Organic materials, Photonic devices, Optical interconnects, Fabrication, Metals, Thin film manufacturing, Thin films, Manufacturing

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Showing 5 of 10 publications

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