Mr. Tomohiro Yoshida Profile

Tomohiro Yoshida

Manager at Dai Nippon Screen Manufacturing Co Ltd

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Publications (3)

Proceedings Article | 29 March 2006 Paper

Novel fluorinated polymers for application in 193-nm lithography and 193-nm immersion lithography

Tsuneo Yamashita, Takuji Ishikawa, Tomohiro Yoshida, Takashi Hayami, Hirokazu Aoyama

Proceedings Volume 6153, 615325 (2006) https://doi.org/10.1117/12.656938

KEYWORDS: Polymers, Water, Immersion lithography, Standards development, Lithography, Transparency, Fluorine, Absorbance, Quartz, Crystals

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Proceedings Article | 10 May 2005 Paper

Spectroscopic ellipsometer with the smallest measurement spot

Akihiro Kinoshita, Fujikazu Kitamura, Masahiro Horie, Tomohiro Yoshida

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598683

KEYWORDS: Semiconducting wafers, Spectroscopy, Polarizers, Mirrors, Spectroscopes, Aspheric optics, Light sources, Polarization, Silicon, Optical spectroscopy

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Proceedings Article | 4 May 2005 Paper

Synthesis of fluorinated materials for 193-nm immersion lithography and 157-nm lithography

T. Yamashita, T. Ishikawa, T. Yoshida, T. Hayamai, Takayuki Araki, H. Aoyama, T. Hagiwara, Toshiro Itani, Kiyoshi Fujii

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599523

KEYWORDS: Polymers, Fluorine, Lithography, Immersion lithography, Transparency, Standards development, Quartz, Crystals, Photomasks, Polymerization

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