Dr. Vivek G. Badami Profile

Dr. Vivek G. Badami

Technology Fellow at Zygo Corporation

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Author

Publications (5)

Proceedings Article | 4 October 2023 Presentation

X-Ray and EUV optics: driving the state of the art in optical metrology

Peter de Groot, Vivek Badami

Proceedings Volume PC12695, PC1269502 (2023) https://doi.org/10.1117/12.2683997

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Proceedings Article | 9 September 2019 Open Access

Controlling an active bimorph deformable mirror with sub-nanometre resolution

Ioana-Theodora Nistea, Simon Alcock, Vivek Badami, Riccardo Signorato, Kawal Sawhney

Proceedings Volume 11109, 111090E (2019) https://doi.org/10.1117/12.2529322

KEYWORDS: Mirrors, Sensors, Metrology, Deformable mirrors, Power supplies, X-ray optics, Interferometry

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Proceedings Article | 18 September 2018 Open Access

Real-time feedback for x-ray adaptive optics with an interferometric absolute distance sensor array

Ernesto Abruña, Vivek Badami, Lei Huang, Mourad Idir

Proceedings Volume 10761, 107610H (2018) https://doi.org/10.1117/12.2323698

KEYWORDS: Sensors, Metrology, X-ray optics, Adaptive optics, Interferometry, In situ metrology, Position sensors, Synchrotron radiation imaging, Deformable mirrors, Fiber optics sensors

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Proceedings Article | 18 August 2005 Paper

Uncertainty evaluation of a fiber-based interferometer for the measurement of absolute dimensions

Vivek Badami, Todd Blalock

Proceedings Volume 5879, 587903 (2005) https://doi.org/10.1117/12.617022

KEYWORDS: Interferometers, Optical testing, Collimators, Thermal effects, Calibration, Interferometry, Temperature metrology, Error analysis, Mirrors, Clocks

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Proceedings Article | 1 July 2002 Paper

Ultrahigh-accuracy measurement of the coefficient of thermal expansion for ultralow expansion materials

Vivek Badami, Michael Linder

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472323

KEYWORDS: Temperature metrology, Interferometers, Metrology, Error analysis, Thermography, Fabry–Perot interferometers, Optical coatings, Reflectivity, Statistical analysis, Refractive index

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