Phase-measuring deflectometry is a powerful method to measure reflective surfaces. It is relatively easy to extract slope
and curvature information from the measured phase maps; however, retrieving shape information depends very
sensitively on the calibration of the camera and the geometry of the measurement system. Whereas we have previously
demonstrated shape uncertainties below 1 μm, the range below 100 nm is currently inaccessible to deflectometric shape
measurement.
On the other hand, the astounding sensitivity of deflectometry can be put to good use for deformation measurements. The
evaluation of corresponding shape differences rather than absolute shapes is much less susceptible to system calibration
errors and its resolution is given mostly by the measurement system’s sensitivity.
We give an overview of recent progress in difference deflectometry. Firstly we show results from solar mirror substrates
under load to detect flaws with high sensitivity.
Secondly we present a preliminary simulation study of achievable deformation-measurement uncertainties to assess the
feasibility of deflectometric characterisation of actuator performance and gravity sag for the mirror segments of the
European Extremely Large Telescope (E-ELT). Results for the relevant Zernike terms show reliable detection of Zernike
coefficients at the 25 nm level. Random artefacts related to noise in the phase measurements are seen to translate into
bogus Zernike terms, and we discuss possible mitigation techniques to enhance the sensitivity and accuracy further.
Deflectometry utilises the deformation and displacement of a sample pattern after reflection from a test surface to infer
the surface slopes. Differentiation of the measurement data leads to a curvature map, which is very useful for surface
quality checks with sensitivity down to the nanometre range. Integration of the data allows reconstruction of the absolute
surface shape, but the procedure is very error-prone because systematic errors may add up to large shape deviations. In
addition, there are infinitely many combinations for slope and object distance that satisfy a given observation. One
solution for this ambiguity is to include information on the object’s distance. It must be known very accurately. Two
laser pointers can be used for positioning the object, and we also show how a confocal chromatic distance sensor can be
used to define a reference point on a smooth surface from which the integration can be started.
The used integration algorithm works without symmetry constraints and is therefore suitable for free-form surfaces as
well. Unlike null testing, deflectometry also determines radius of curvature (ROC) or focal lengths as a direct result of
the 3D surface reconstruction. This is shown by the example of a 200 mm diameter telescope mirror, whose ROC
measurements by coordinate measurement machine and deflectometry coincide to within 0.27 mm (or a sag error of
1.3μm). By the example of a diamond-turned off-axis parabolic mirror, we demonstrate that the figure measurement
uncertainty comes close to a well-calibrated Fizeau interferometer.
Accurate 3D shape measurement is of big importance for industrial inspection. Because of the robustness, accuracy and ease of use optical measurement techniques are gaining importance in industry. For fast 3D measurements on big surfaces fringe projection is commonly used: A projector projects fringes onto the object under investigation and the scattered light is recorded by a camera from a triangulation angle. Thus, it is possible reaching a depth resolution of about one by 10.000 of the measurement field size (e.g. 100 μm for a 1 m sized field). For non- or low scattering objects it is common to put scattering material like particle spray onto the object under investigation. Objects where this is not allowed are often regarded as problematic objects for full field non-coherent optical measurement techniques. The solution is to switch from fringe projection to fringe reflection. The fringe reflection technique needs a simple setup to evaluate a fringe pattern that is reflected from the surface under investigation. Like for fringe projection the evaluated absolute phase identifies the location of the originating fringe. This allows identifying the reflection angles on the object for every camera pixel. The results are high resolution local gradients on the object which can be integrated to get the 3D shape. The achievable depth resolution compared to fringe projection is much better and reaches to a depth resolution down to 1 nm for smooth surfaces. We have proven the ability, robustness and accuracy of the technique for various technical objects and also fluids. A parallel paper of this conference 'Evaluation Methods for Gradient Measurement Techniques' picks up further processing of the evaluated data and explains in more detail the performed calculations. This paper mainly concentrates on the fringe reflection principle, reachable resolution and possible applications.
Many optical metrology methods deliver 2D fields of gradients, such as shearography, Shack-Hartmann sensors and the fringe reflection technique that produce gradients for deformation, wave-front shape and object shape, respectively. The evaluation for gradient data usually includes data processing, feature extraction and data visualization. The matters of this talk are optimized and robust processing methods to handle and prepare the measured gradients. Special attention was directed to the fact that optical measurements typically produce data far from ideal behavior and that parts of the measured area are usually absent or invalid. A robust evaluation must be capable to deliver reliable results with non perfect data and the evaluation speed should be sufficient high for industrial applications. Possible data analysis methods for gradients are differentiation and further integration as well as vector processing when orthogonal gradients are measured. Evaluation techniques were investigated and optimized (e.g. for effective bump and dent analysis). Key point of the talk will be the optimized data integration that delivers the potential of measured gradients. I.e. for the above mentioned examples: the deformation, wave-front and object shape are delivered by successful data integration. Local and global existing integration methods have been compared and the optimum techniques were combined and improved for an accelerated and robust integration technique that is able to deal with complicated data validity masks and noisy data with remaining vector rotation which normally defeats a successful integration. The evaluation techniques are compared, optimized and results are shown for data from shearography and the fringe reflection technique (, which is demonstrated in talk “High Resolution 3D Shape Measurement on Specular Surfaces by Fringe Reflection”).
Fast and robust 3D quality control as well as fast deformation measurement is of particular importance for industrial inspection. Additionally a direct response about measured properties is desired. Therefore, robust optical techniques are needed which use as few images as possible for measurement and visualize results in an efficient way. One promising technique for this aim is the inverse pattern projection which has the following advantages:
The technique codes the information of a preceding measurement into the projected inverse pattern. Thus, it is possible to do differential measurements using only one camera frame for each state. Additionally, the results are optimized straight fringes for sampling which are independent of the object curvature. The hardware needs are low as just a programmable projector and a standard camera are necessary.
The basic idea of inverse pattern projection, necessary algorithms and found optimizations are demonstrated, roughly. Evaluation techniques were found to preserve a high quality phase measurement under imperfect conditions.
The different application fields can be sorted out by the type of pattern used for inverse projection. We select two main topics for presentation. One is the incremental (one image per state) deformation measurement which is a promising technique for high speed deformation measurements. A video series of a wavering flag with projected inverse pattern was evaluated to show the complete deformation series.
The other application is the optical feature marking (augmented reality) that allows to map any measured result directly onto the object under investigation. Any properties can be visualized directly on the object’s surface which makes inspections easier than with use of a separated indicating device. The general ability to straighten any kind of information on 3D surfaces is shown while preserving an exact mapping of camera image and object parts. In many cases this supersedes an additional monitor to view results and allows an operator to investigate results on the object, directly.
Fast and robust 3D quality control as well as fast deformation measurement is of particular importance for industrial inspection. Additionally a direct response about measured properties is desired. Therefore, robust optical techniques are needed which use as few images as possible for measurement and visualize results in an efficient way. One promising technique for this aim is the inverse pattern projection which has the following advantages:
The technique codes the information of a preceding measurement into the projected inverse pattern. Thus, it is possible to do differential measurements using only one camera frame for each state. Additionally, the results are optimized straight fringes for sampling which are independent of the object curvature. The ability to use any image for inverse projection enables the use for augmented reality, i.e. any properties can be visualized directly on the object's surface which makes inspections easier than with use of a separated indicating device. The hardware needs are low as just a programmable projector and a standard camera are necessary.
The basic idea of inverse pattern projection, necessary algorithms ane found optimizations are demonstrated, roughly. Evaluation techniques were found to preserve a high quality phase measurement under imperfect conditions.
The different application fields can be sorted out by the type of pattern used for inverse projection. We select two main topics for presentation. One is the incremental (one image per state) deformation measurement which is a promising technique for high speed deformation measurements. A video series of a wavering flag with projected inverse pattern was evaluated to show the complete deformation series.
The other application is the optical feature marking (augmented reality) that allows to map any measured result directly onto the object under investigation. The general ability to straighten any kind of information on 3D surfaces is shown while preserving an exact mapping of camera image and object parts. In many cases this supersedes an additional monitor to view results and allows an operator to investigate results on the object, directly.
A new improved unwrapping algorithm based on the combination of modulation and phase fitting reliability is presented. For the measurement of the sand-like object and the surface with complex reflectivity, the noises such as saturation/cut-off and quasi-speckle in the fringe images are important error sources. The phase unwrapping algorithm only based on fringe modulation is not enough to bypass these error points. In this paper, the characteristics of the phase measurement errors caused by saturation/cut-off are analyzed, and a new phase reliability criterion that is sensitive to both modulation and some intensity noises is defined to reduce the unwrapping errors. With this new reliability criterion and 'flood' unwrapping algorithm, the phase unwrapping is implemented along the more reliable path and the errors are limited in the minimum areas.
Modulation value play a significant role in Modulation Measurement Profilometry. By projection sinusoidal fringe on an object, then shift the sinusoidal grating in one period L(L >= 3) times with equal interval, we can calculate the modulation distribution on the object with these L frames of the fringe pattern. Incorrect modulation can arise when phase-shift error exist. In this paper we give out the general expression of modulation calculation for any phase- shift interval with least-square method when L equals 5. The result proved that the calibration is necessary and useful when phase-shift error exist.
In phase-measuring profilometry, the accuracy of the phase- shifting is very important. In this paper, a new simultaneous calibration algorithm of phase-shifting based on fast Fourier transform (FFT) is presented. The current phase shifting is calculated with the help of the information of an additional fringe pattern and a FFT modulation mask. With this algorithm, we can accurately control the moving of the project grating simultaneous, the accuracy and the automation of the measuring system are improved greatly.
This article propose a new Fourier transform profilometry based on modulation measurement. We briefly call it FTP based on MM. Its main advantage is that it can measure the surface of a complex object in the same direction of projecting light, so it has no the difficulties due to shadow and spatial discontinuity that exist in conventional FTP and also PMP methods. In the paper, we give the principle of the method, the set-up of measurement system, and some primary experimental results. The results proved that this method is a promising method for acquiring 3D data of complex object.
This article propose a new optical method for 3-D profilometry, it is not based on the conventional method of structured light triangulation, but on modulation measurement(we briefly call it MMP). Its main advantage is that it can measure the surface of a testing object in the same direction of projecting light, so it has no the difficulties due to shadow and spatial discontinuity that exist in PMP and FTP methods and needn't to know the phases. We have measured some objects to verify this method and got some meaningful results. The results proved that this method can be useful to 3-D profilometry .. 3-D sensing machine vision and so on.
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