Dr. Wayne R. McKinney
Optical Consultant
SPIE Involvement:
Author
Area of Expertise:
Diffraction Gratings , VUV and Soft X-ray Optics , Optical Metrology , Grazing Incidence Optical Path , Scientific Programming , Ray Tracing
Websites:
Publications (55)

Proceedings Article | 4 October 2022 Presentation + Paper
Proceedings Volume 12240, 122400C (2022) https://doi.org/10.1117/12.2633103
KEYWORDS: Microscopes, X-ray optics, Interferometry, Software development, X-rays, Data processing, Mirrors, Sensors, Data acquisition, Metrology

Proceedings Article | 18 September 2018 Paper
Proceedings Volume 10761, 1076108 (2018) https://doi.org/10.1117/12.2323218
KEYWORDS: Mirrors, X-rays, Grazing incidence, Metrology, X-ray optics, Optimization (mathematics), Software development, Geometrical optics, Error analysis, Algorithm development

Proceedings Article | 7 September 2017 Presentation + Paper
Proceedings Volume 10385, 103850I (2017) https://doi.org/10.1117/12.2274400
KEYWORDS: X-ray optics, Metrology, Interferometry, Prisms, Optical metrology, Free electron lasers, Diffraction, Synchrotrons, Coherent x-ray sources, X-ray sources

SPIE Journal Paper | 12 October 2015 Open Access
OE, Vol. 54, Issue 10, 104104, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.104104
KEYWORDS: Metrology, X-ray optics, Control systems, Mirrors, Humidity, X-rays, Temperature metrology, Interferometry, Calibration, Particles

Proceedings Article | 1 September 2015 Paper
Proceedings Volume 9576, 957608 (2015) https://doi.org/10.1117/12.2185191
KEYWORDS: Modulation transfer functions, Binary data, Calibration, Spatial frequencies, Standards development, Optical microscopes, Silicon, Error analysis, Sensors, Optical fabrication

Proceedings Article | 17 September 2014 Paper
Proceedings Volume 9206, 92060I (2014) https://doi.org/10.1117/12.2062042
KEYWORDS: Metrology, X-ray optics, Calibration, Mirrors, Humidity, Temperature metrology, Optical testing, Interferometry, Control systems, Particles

Proceedings Article | 17 September 2014 Paper
Ian Lacey, Nikolay Artemiev, Edward Domning, Wayne McKinney, Gregory Morrison, Simon Morton, Brian Smith, Valeriy Yashchuk
Proceedings Volume 9206, 920603 (2014) https://doi.org/10.1117/12.2061969
KEYWORDS: Calibration, X-ray optics, Mirrors, Metrology, Autocollimators, Optical testing, Optical spheres, Light sources, Spherical lenses, Precision calibration

Proceedings Article | 27 September 2013 Paper
Proceedings Volume 8848, 88480L (2013) https://doi.org/10.1117/12.2027146
KEYWORDS: Mirrors, Beam splitters, Sensors, Fabry–Perot interferometers, Metrology, X-ray optics, Interferometers, Fourier transforms, Coating, Data acquisition

Proceedings Article | 23 September 2013 Paper
Proceedings Volume 8838, 883808 (2013) https://doi.org/10.1117/12.2024416
KEYWORDS: Optical aberrations, Zoom lenses, Microscopes, Modulation transfer functions, X-ray optics, Interferometry, Surface finishing, Metrology, Sensors, Optical testing

Proceedings Article | 6 August 2013 Paper
Regina Soufli, Mónica Fernández-Perea, Jacek Krzywinski, David Rich, Sherry Baker, Jeff Robinson, Stefan Hau-Riege, Eric Gullikson, Valeriy Yashchuk, Wayne McKinney, Philip Heimann, William Schlotter, Michael Rowen, Paul Montanez, Sébastien Boutet
Proceedings Volume 8777, 877702 (2013) https://doi.org/10.1117/12.2019197
KEYWORDS: Liquid crystal lasers, Coating, Mirrors, X-rays, Reflectivity, Free electron lasers, X-ray optics, Atomic force microscopy, Carbon, Silicon carbide

SPIE Journal Paper | 14 March 2013 Open Access
Daniel Merthe, Valeriy Yashchuk, Kenneth Goldberg, Martin Kunz, Nobumichi Tamura, Wayne McKinney, Nikolay Artemiev, Richard Celestre, Gregory Morrison, Erik Anderson, Brian Smith, Edward Domning, Senajith Rekawa, Howard Padmore
OE, Vol. 52, Issue 03, 033603, (March 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.3.033603
KEYWORDS: Mirrors, Wavefronts, X-rays, Optical alignment, In situ metrology, X-ray optics, Optical testing, Charge-coupled devices, X-ray diffraction, Shearing interferometers

Proceedings Article | 15 October 2012 Paper
Proceedings Volume 8501, 850109 (2012) https://doi.org/10.1117/12.930156
KEYWORDS: Mirrors, X-ray optics, Computer programming, X-rays, Error analysis, Optimization (mathematics), Light sources, Synchrotrons, In situ metrology, Numerical analysis

Proceedings Article | 15 October 2012 Paper
Nikolay Artemiev, Daniel Merthe, Daniele Cocco, Nicholas Kelez, Thomas McCarville, Michael Pivovaroff, David Rich, James Turner, Wayne McKinney, Valeriy Yashchuk
Proceedings Volume 8501, 850105 (2012) https://doi.org/10.1117/12.945915
KEYWORDS: Mirrors, Metrology, X-rays, Optical metrology, X-ray optics, Free electron lasers, Silicon, Light sources, Interferometers, Calibration

Proceedings Article | 15 October 2012 Paper
Proceedings Volume 8501, 85010B (2012) https://doi.org/10.1117/12.930056
KEYWORDS: Beam splitters, Fabry–Perot interferometers, Metrology, Coating, X-ray optics, Sensors, Mirrors, Interferometers, Optical fabrication, Fourier transforms

Proceedings Article | 15 October 2012 Paper
Daniel Merthe, Valeriy Yashchuk, Kenneth Goldberg, Martin Kunz, Nobumichi Tamura, Wayne McKinney, Nikolay Artemiev, Richard Celestre, Gregory Morrison, Erik Anderson, Brian Smith, Edward Domning, Senajith Rekawa, Howard Padmore
Proceedings Volume 8501, 850108 (2012) https://doi.org/10.1117/12.930023
KEYWORDS: Mirrors, Wavefronts, X-rays, In situ metrology, Optical alignment, X-ray optics, Optical testing, Shearing interferometers, Metrology, Charge-coupled devices

Proceedings Article | 15 October 2012 Paper
Nikolay Artemiev, Ken Chow, Daniele La Civita, Daniel Merthe, Yi-De Chuang, Wayne McKinney, Valeriy Yashchuk
Proceedings Volume 8501, 850107 (2012) https://doi.org/10.1117/12.929098
KEYWORDS: Finite element methods, Mirrors, Optics manufacturing, Optical sensors, X-ray optics, Shape analysis, Optical components, Solids, Metrology, Error analysis

Proceedings Article | 12 October 2011 Paper
Proceedings Volume 8147, 814719 (2011) https://doi.org/10.1117/12.895532
KEYWORDS: Sensors, Fourier transforms, Coating, Metrology, X-ray optics, Mirrors, Beam splitters, Fabry–Perot interferometers, X-rays, Time metrology

Proceedings Article | 28 September 2011 Paper
Daniel Merthe, Kenneth Goldberg, Valeriy Yashchuk, Sheng Yuan, Wayne McKinney, Richard Celestre, Iacopo Mochi, James Macdougall, Gregory Morrison, Senajith Rakawa, Erik Anderson, Brian Smith, Edward Domning, Tony Warwick, Howard Padmore
Proceedings Volume 8139, 813907 (2011) https://doi.org/10.1117/12.894116
KEYWORDS: Mirrors, Wavefronts, Charge-coupled devices, Interferometry, X-rays, CCD cameras, Metrology, Light sources, Solids, X-ray optics

Proceedings Article | 23 September 2011 Paper
Zulfiqar Ali, Nikolay Artemiev, Curtis Cummings, Edward Domning, Nicholas Kelez, Wayne McKinney, Daniel Merthe, Gregory Morrison, Brian Smith, Valeriy Yashchuk
Proceedings Volume 8141, 81410O (2011) https://doi.org/10.1117/12.894061
KEYWORDS: Error analysis, Mirrors, X-ray optics, Semiconductor lasers, Kinematics, Data acquisition, Sensors, Channel projecting optics, Control systems, Fiber coupled lasers

Proceedings Article | 23 September 2011 Paper
Proceedings Volume 8141, 81410K (2011) https://doi.org/10.1117/12.894175
KEYWORDS: Mirrors, Monochromatic aberrations, Solids, X-rays, Grazing incidence, Optical metrology, X-ray optics, Commercial off the shelf technology, Synchrotrons, Shape analysis

SPIE Journal Paper | 1 September 2011 Open Access
OE, Vol. 50, Issue 09, 093604, (September 2011) https://doi.org/10.1117/12.10.1117/1.3622485
KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

Proceedings Article | 2 September 2010 Paper
Proceedings Volume 7801, 78010B (2010) https://doi.org/10.1117/12.860049
KEYWORDS: Modulation transfer functions, Transmission electron microscopy, Scanning electron microscopy, Calibration, Binary data, Interferometers, Electron microscopes, Silicon, Spatial frequencies, Interferometry

Proceedings Article | 2 September 2010 Paper
Wayne McKinney, Mark Anders, Samuel Barber, Edward Domning, Yunian Lou, Gregory Morrison, Farhad Salmassi, Brian Smith, Valeriy Yashchuk
Proceedings Volume 7801, 780106 (2010) https://doi.org/10.1117/12.861401
KEYWORDS: Phase shifts, Head, Beam splitters, Polarization, Semiconductor lasers, Fiber lasers, Mirrors, Fiber coupled lasers, Ocean optics, Sensors

Proceedings Article | 28 August 2010 Paper
Sheng Yuan, Kenneth Goldberg, Valeriy Yashchuk, Richard Celestre, Iacopo Mochi, James Macdougall, Gregory Morrison, Brian Smith, Edward Domning, Wayne McKinney, Tony Warwick
Proceedings Volume 7801, 78010D (2010) https://doi.org/10.1117/12.859946
KEYWORDS: Mirrors, X-rays, Metrology, In situ metrology, X-ray optics, Optical alignment, Wavefronts, YAG lasers, Diffraction, Crystals

SPIE Journal Paper | 1 May 2010
OE, Vol. 49, Issue 05, 053606, (May 2010) https://doi.org/10.1117/12.10.1117/1.3431659
KEYWORDS: Modulation transfer functions, Calibration, Spatial frequencies, Binary data, Profilometers, Etching, Microscopes, Scanning probe microscopy, Interferometry, Silicon

Proceedings Article | 4 September 2009 Paper
Proceedings Volume 7448, 744809 (2009) https://doi.org/10.1117/12.828490
KEYWORDS: X-ray optics, Mirrors, Grazing incidence, Optics manufacturing, Polishing, Ray tracing, Surface finishing, Solids, Geometrical optics, Spherical lenses

Proceedings Article | 4 September 2009 Paper
Proceedings Volume 7448, 744803 (2009) https://doi.org/10.1117/12.825389
KEYWORDS: Modulation transfer functions, Spatial frequencies, Calibration, Scanning probe microscopy, Binary data, Profilometers, Etching, Silicon, Sensors, Microscopes

SPIE Journal Paper | 1 August 2009
OE, Vol. 48, Issue 08, 083601, (August 2009) https://doi.org/10.1117/12.10.1117/1.3204235
KEYWORDS: Mirrors, Calibration, Ray tracing, Optical engineering, Computer programming, Metrology, Error analysis, Geometrical optics, Synchrotrons, Light sources

Proceedings Article | 3 September 2008 Paper
Jonathan Kirschman, Edward Domning, Wayne McKinney, Gregory Morrison, Brian Smith, Valeriy Yashchuk
Proceedings Volume 7077, 70770A (2008) https://doi.org/10.1117/12.796335
KEYWORDS: Sensors, Cameras, Calibration, Error analysis, Mirrors, Metrology, Optical components, X-ray optics, CCD image sensors, Channel projecting optics

SPIE Journal Paper | 1 July 2008
OE, Vol. 47, Issue 07, 073602, (July 2008) https://doi.org/10.1117/12.10.1117/1.2955798
KEYWORDS: Modulation transfer functions, Microscopes, Binary data, Calibration, Spatial frequencies, Interferometry, Sensors, Objectives, Optical engineering, Profilometers

SPIE Journal Paper | 1 May 2008 Open Access
Hoi-Ying Holman, Kathy Bjornstad, Michael Martin, Wayne McKinney, Eleanor Blakely, Francis Blankenberg
JBO, Vol. 13, Issue 03, 030503, (May 2008) https://doi.org/10.1117/12.10.1117/1.2937469
KEYWORDS: Mid-IR, Absorption, Reflectivity, FT-IR spectroscopy, Foam, Infrared radiation, Virtual point source, Tissues, Refractive index, Reflectance spectroscopy

Proceedings Article | 20 September 2007 Paper
Proceedings Volume 6704, 67040G (2007) https://doi.org/10.1117/12.736860
KEYWORDS: Mirrors, Ray tracing, Wavefronts, Geometrical optics, Computer programming, Metrology, Monochromatic aberrations, Error analysis, Synchrotron radiation, X-rays

Proceedings Article | 20 September 2007 Paper
Proceedings Volume 6704, 670408 (2007) https://doi.org/10.1117/12.732557
KEYWORDS: Modulation transfer functions, Microscopes, Binary data, Interferometry, Calibration, Spatial frequencies, X-ray optics, Objectives, Optical design, X-rays

Proceedings Article | 20 September 2007 Paper
Valeriy Yashchuk, Wayne McKinney, Tony Warwick, Tino Noll, Frank Siewert, Thomas Zeschke, Ralf Geckeler
Proceedings Volume 6704, 67040A (2007) https://doi.org/10.1117/12.732719
KEYWORDS: Calibration, Mirrors, Nano opto mechanical systems, Autocollimators, Optical components, Light sources, Free electron lasers, Metrology, Precision calibration, X-ray optics

Proceedings Article | 20 September 2007 Paper
Jonathan Kirschman, Edward Domning, Keith Franck, Steven Irick, Alastair MacDowell, Wayne McKinney, Gregory Morrison, Brian Smith, Tony Warwick, Valeriy Yashchuk
Proceedings Volume 6704, 67040J (2007) https://doi.org/10.1117/12.732618
KEYWORDS: Sensors, Calibration, Cameras, CCD image sensors, CCD cameras, Charge-coupled devices, Photodiodes, X-ray optics, Personal digital assistants, Image resolution

Proceedings Article | 29 August 2006 Paper
Proceedings Volume 6317, 63170D (2006) https://doi.org/10.1117/12.681297
KEYWORDS: Convection, Fluctuations and noise, Mirrors, Laser stabilization, Information operations, Interferometers, Optical testing, Semiconductor lasers, Beam analyzers, X-ray optics

Proceedings Article | 17 September 2005 Paper
Proceedings Volume 5921, 59210G (2005) https://doi.org/10.1117/12.619892
KEYWORDS: Mirrors, Modulation transfer functions, Spatial frequencies, X-rays, Scattering, Atomic force microscopy, X-ray optics, Interferometry, Microscopes, Surface finishing

Proceedings Article | 29 August 2005 Paper
Proceedings Volume 5858, 58580A (2005) https://doi.org/10.1117/12.612383
KEYWORDS: Modulation transfer functions, Spatial frequencies, Mirrors, Microscopes, Sensors, X-ray optics, Objectives, Information operations, Interferometry, X-rays

SPIE Journal Paper | 1 July 2002 Open Access
Hoi-Ying Holman, Kathy Bjornstad, Morgan McNamara, Michael Martin, Wayne McKinney, Elanor Blakely
JBO, Vol. 7, Issue 03, (July 2002) https://doi.org/10.1117/12.10.1117/1.1485299
KEYWORDS: Synchrotrons, Infrared radiation, Infrared spectroscopy, Microscopes, FT-IR spectroscopy, Photography, Biological research, Biochemistry, Mid-IR, Photons

Proceedings Article | 8 May 2000 Paper
Hoi-Ying Holman, Regine Goth-Goldstein, Elanor Blakely, Kathy Bjornstad, Michael Martin, Wayne McKinney
Proceedings Volume 3918, (2000) https://doi.org/10.1117/12.384959
KEYWORDS: Proteins, Synchrotrons, Infrared spectroscopy, Infrared radiation, Microscopy, Spatial resolution, Spectroscopy, Biological research, Chemical analysis, Tissues

Proceedings Article | 25 October 1999 Paper
Wayne McKinney, Michael Martin, John Byrd, R. Miller, Mike Chin, G. Portman, Edward Moler, Ted Lauritzen, J. McKean, Mark West, N. Kellogg, V. Zhuang, P. Ross, Joel Ager, Wei Shan, Eugene Haller
Proceedings Volume 3775, (1999) https://doi.org/10.1117/12.366650
KEYWORDS: Mirrors, Infrared radiation, Synchrotrons, Microscopes, Bacteria, Surface properties, Chromium, FT-IR spectroscopy, Infrared spectroscopy, Reflectivity

Proceedings Article | 25 October 1999 Paper
John Byrd, Mike Chin, Michael Martin, Wayne McKinney, R. Miller
Proceedings Volume 3775, (1999) https://doi.org/10.1117/12.366652
KEYWORDS: Infrared radiation, FT-IR spectroscopy, Synchrotrons, Molybdenum, Light sources, Motion measurement, Interferometers, Denoising, Oscillators, Synchrotron radiation

Proceedings Article | 3 June 1999 Paper
Hoi-Ying Holman, Miqin Zhang, Regine Goth-Goldstein, Michael Martin, Marion Russell, Wayne McKinney, Mauro Ferrari, Jennie Hunter-Cevera
Proceedings Volume 3606, (1999) https://doi.org/10.1117/12.350062
KEYWORDS: FT-IR spectroscopy, Absorption, Infrared radiation, Absorbance, Synchrotrons, Microfabrication, Infrared spectroscopy, Environmental sensing, Biological research, Signal detection

Proceedings Article | 24 September 1998 Paper
Proceedings Volume 3450, (1998) https://doi.org/10.1117/12.323406
KEYWORDS: Diffraction gratings, Monochromatic aberrations, Monochromators, Imaging systems, Surface finishing, Optical design, Diffraction, Synchrotron radiation, Metals, Polishing

Proceedings Article | 24 September 1998 Paper
Christopher Palmer, Benjamin Wheeler, Wayne McKinney
Proceedings Volume 3450, (1998) https://doi.org/10.1117/12.323410
KEYWORDS: Imaging systems, Multi-element lenses, Mirrors, Optical components, Spherical lenses, Imaging spectroscopy, Spectroscopy, Computing systems, Monochromators, Wavefront aberrations

Proceedings Article | 24 September 1998 Paper
Christopher Palmer, Wayne McKinney, Benjamin Wheeler
Proceedings Volume 3450, (1998) https://doi.org/10.1117/12.323404
KEYWORDS: Imaging systems, Wavefront aberrations, Diffraction gratings, Optical components, Diffraction, Chemical elements, Geometrical optics, Wavefronts, Multi-element lenses, Imaging spectroscopy

Proceedings Article | 3 November 1997 Paper
Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.292730
KEYWORDS: Mirrors, Wavefront aberrations, Scientific programming, Optical design, Imaging systems, Software development, Diffraction gratings, Wavefronts, Computing systems, Roads

Proceedings Article | 3 November 1997 Paper
Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.292731
KEYWORDS: Geometrical optics, Diffraction gratings, Synchrotron radiation, Optical design, Ray tracing, Grazing incidence, Monochromatic aberrations, Wavefronts, Light, Diffraction

Proceedings Article | 16 October 1997 Paper
Wayne McKinney, Carol Hirschmugl, Howard Padmore, Ted Lauritzen, Nord Andresen, Greg Andronaco, Rob Patton, Martin Fong
Proceedings Volume 3153, (1997) https://doi.org/10.1117/12.290260
KEYWORDS: Mirrors, Infrared radiation, Microscopy, Diamond, Optical design, Microscopes, Surface properties, FT-IR spectroscopy, Interferometers, Infrared spectroscopy

Proceedings Article | 22 November 1996 Paper
Benjamin Wheeler, Wayne McKinney, Zahid Hussain, Howard Padmore
Proceedings Volume 2856, (1996) https://doi.org/10.1117/12.259865
KEYWORDS: Mirrors, Spectral resolution, Optical design, Spectrographs, Absorption, Systems modeling, X-rays, Carbon, Synchrotrons, Adaptive optics

Proceedings Article | 25 September 1995 Paper
Proceedings Volume 2516, (1995) https://doi.org/10.1117/12.221677
KEYWORDS: Monochromators, Mirrors, Diffraction gratings, Diffraction, Spherical lenses, Spectral resolution, Monochromatic aberrations, Magnetism, Synchrotron radiation, Solids

SPIE Journal Paper | 1 March 1994
OE, Vol. 33, Issue 03, (March 1994) https://doi.org/10.1117/12.10.1117/12.160872
KEYWORDS: Imaging systems, Holography, Mirrors, Wavefronts, Diffraction gratings, Diffraction, Geometrical optics, Monochromators, Spectroscopy, Spherical lenses

Proceedings Article | 20 January 1993 Paper
David Lunt, Jonathan Bender, Donald Ewing, Wayne McKinney
Proceedings Volume 1740, (1993) https://doi.org/10.1117/12.138698
KEYWORDS: Surface finishing, Mirrors, Polishing, Nickel, Metrology, Synchrotrons, Surface roughness, Synchrotron radiation, Optics manufacturing, Light sources

Proceedings Article | 20 January 1993 Paper
Proceedings Volume 1740, (1993) https://doi.org/10.1117/12.138697
KEYWORDS: Mirrors, Synchrotron radiation, Optical components, Optical spheres, Synchrotrons, Spherical lenses, Nickel, Polishing, Optics manufacturing, Light sources

Proceedings Article | 20 October 1992 Paper
Proceedings Volume 1720, (1992) https://doi.org/10.1117/12.132173
KEYWORDS: Distortion, Mirrors, Fourier transforms, Detector arrays, Profiling, Lens design, Optical testing, Synchrotrons, Ceramics, Optical design

Showing 5 of 55 publications
Proceedings Volume Editor (3)

Conference Committee Involvement (6)
Advances in Metrology for X-Ray and EUV Optics IV
12 August 2012 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics III
1 August 2010 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics II
30 August 2007 | San Diego, California, United States
Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications
20 July 1998 | San Diego, CA, United States
Gratings and Grating Monochromators for Synchrotron Radiation
31 July 1997 | San Diego, CA, United States
International Conference on the Application and Theory of Periodic Structures
24 July 1991 | San Diego, CA, United States
Showing 5 of 6 Conference Committees
Course Instructor
NON-SPIE: Diffraction Gratings: Manufacture, Specification, and Application
Diffraction gratings are the most important wavelength dispersing optic from the soft x-ray to the infrared. This tutorial outlines the important details about the manufacture and specification of this important optical component. Both ruled and interferometrically generated gratings are covered, emphasizing the differences and unique advantages of each type. Important applications of gratings are briefly covered at the end of the tutorial. The tutorial was presented at the SPIE Annual Meeting in San Diego in conjunction with Conference 503, "International Conference on the Application, Theory, and Fabrication of Periodic Structures, Diffraction Gratings, and Moire Phenomena II.
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