For monitoring the optical properties of material under a dynamical processing, we design a compact in-situ ellipsometry
by using a liquid crystal (LC) phase retarder. Since the key issue of an accurate ellipsometer is the alignment of each
optical component in the system, hence we not only proposed the alignment procedure, we also calibrated the phase
retardation of LC retarder for this in-situ ellipsometry. The azimuths of polarizers and phase retarders can be aligned by
the analytical solutions of the azimuthal deviations. The phase retardation can be directly determined by the intensity
ratio technique.
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