Dr. Willie J. Yarbrough Profile

Dr. Willie J. Yarbrough

Senior Member/Technical Staff

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Author

Publications (3)

Proceedings Article | 17 March 2006 Paper

Improving asymmetric printing and low margin using custom illumination for contact hole lithography

Scott Jessen, Mark Terry, Mark Mason, Sean O'Brien, Robert Soper, Willie Yarbrough, Thomas Wolf

Proceedings Volume 6156, 615616 (2006) https://doi.org/10.1117/12.660120

KEYWORDS: SRAF, Printing, Optical proximity correction, Lithographic illumination, Fiber optic illuminators, Lithography, Logic devices, Photomasks, Metals, Logic

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Proceedings Article | 7 July 1997 Paper

Control and uniformity of 280-nm features in i-line lithography using optical proximity corrections and off-axis illumination

Pat Watson, Joseph Garofalo, M. Hansen, Ilya Grodnensky, Ludwik Zych, R. Takahashi, Willie Yarbrough, Edward Ehrlacher, A. Reim, R. Vella, A. Dunbar, Albert Colina, B. Herrero, D. Castro

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.275997

KEYWORDS: Lithographic illumination, Lithography, Optical proximity correction, Critical dimension metrology, Manufacturing, SRAF, Reticles, Photomasks, Matrices

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Proceedings Article | 27 December 1996 Paper

Lithography tricks and tribulations

Joseph Garofalo, Pat Watson, Lee Trimble, Raymond Cirelli, Albert Colina, Ilya Grodnensky, B. Herrero, A. Dunbar, Frederick Peiffer, R. Takahashi, Regine Tarascon-Auriol, Willie Yarbrough, Ludwik Zych

Proceedings Volume 2884, (1996) https://doi.org/10.1117/12.262814

KEYWORDS: Photomasks, Optical proximity correction, Deep ultraviolet, Lithography, Resolution enhancement technologies, Semiconducting wafers, Binary data, Mask making, Process modeling, Optical lithography

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