Mr. Xingdi Zhang Profile

Xingdi Zhang

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Pattern-centric yield management approach with machine learning to detect and track defects with full chip coverage

Yu Zhang, Shirui Yu, Jiaqi Liu, Renyang Meng, Long Yin, Kai Wang, Kun Cai, Xingdi Zhang, Xinghua Song, Jiadong Ren, Abhishek Vikram, Changlian Yan, Guojie Cheng, Hui Wang, Qing Zhang, Wenkui Liao

Proceedings Volume 11614, 1161406 (2021) https://doi.org/10.1117/12.2583454

KEYWORDS: Scanning electron microscopy, Wafer inspection, Machine learning, Semiconducting wafers, Databases, Defect detection, Wafer-level optics, Image processing, Semiconductor manufacturing, Optical proximity correction

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years