We will discuss recently-developed approaches to improve sensitivity of superconducting nanowire single photon detectors in the mid-infrared, showing saturated internal detection efficiency up to a wavelength of 10 microns. We will also show preliminary data from small 64-element SNSPD arrays with high internal detection efficiency in the midinfrared at 3.5 μm, and will discuss calibration techniques we are developing for measuring system detection efficiency in this region of the spectrum.
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