Dr. Ying Qi Profile

Dr. Ying Qi

at Entegris Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 25 May 2022 Poster + Paper

Kusum Maharjan, Iou-Sheng Ke, Sabrina Wong, Aiwen Wu, Ying Qi, James Hamzik, Lawrence Chen

Proceedings Volume 12055, 120550V (2022) https://doi.org/10.1117/12.2614308

KEYWORDS: Metals, Iron, Optical lithography, Zinc, Calcium, Sodium, Aluminum, Magnesium, Copper

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Keywords/Phrases