A novel ultra-compact high-efficiency broadband mode converter between silicon (Si) nanowire and silicon slot waveguide based on Silicon-on-Insulator (SOI) is proposed in this paper. By introducing a gradual-width structure between Si nanowire and slot waveguide, the favorable transition between nanowire mode (Gaussian-like mode) and slot mode (non-Gaussian-like mode) can be obtained and then the coupling efficiency is improved. The structure is simulated and optimized by using the three-dimension Finite-Difference Time-Domain Method (3D-FDTD). The coupling efficiency of over 90% within bandwidth of over 600nm can be achieved by only 200nm-length converter which is the smallest size to our knowledge. This presented mode converter can meet the demand of ultra-compact, wavelength-insensitive of monolithic integration.
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