Dr. Yong Kwan Kim Profile

Dr. Yong Kwan Kim

at Apple Inc

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Publications (2)

Proceedings Article | 14 October 2011 Paper

Advanced electron beam resist requirements and challenges

Andrew Jamieson, Yong Kwan Kim, Bennett Olson, Maiying Lu, Nathan Wilcox

Proceedings Volume 8166, 816616 (2011) https://doi.org/10.1117/12.898901

KEYWORDS: Photoresist processing, Photomasks, Electron beams, Manufacturing, Line edge roughness, Electron beam lithography, Semiconducting wafers, Laser phosphor displays, Lithography, Etching

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Proceedings Article | 25 September 2010 Paper

Resist process windows in electron-beam lithography

Andrew Jamieson, Nathan Wilcox, Wai Kwok, Yong Kwan Kim

Proceedings Volume 7823, 78230B (2010) https://doi.org/10.1117/12.868037

KEYWORDS: Laser phosphor displays, Etching, Backscatter, SRAF, Electron beams, Line edge roughness, Photomasks, Manufacturing, Inspection, Image quality

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