Dr. Yoshihiko Saito
Marketing at Tokyo Electron Ltd
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 15 February 2018 Presentation + Paper
Proceedings Volume 10524, 105240F (2018) https://doi.org/10.1117/12.2291881
KEYWORDS: Satellites, Telecommunications, Satellite communications, Optical communications, Laser communications, Ka band, Laser development, Data communications, RF communications, Radio optics

Proceedings Article | 11 May 2009 Paper
Masatoshi Terayama, Hideaki Sakurai, Mari Sakai, Masamitsu Ito, Osamu Ikenaga, Hideo Funakoshi, Takahiro Shiozawa, Syoutarou Miyazaki, Yoshihiko Saito, Naoya Hayashi
Proceedings Volume 7379, 73791X (2009) https://doi.org/10.1117/12.824310
KEYWORDS: Ions, Line edge roughness, Line width roughness, Critical dimension metrology, Spatial frequencies, Photomasks, Photoresist processing, Halftones, Scanning electron microscopy, Fourier transforms

Proceedings Article | 17 October 2008 Paper
Hideaki Sakurai, Masatoshi Terayama, Mari Sakai, Masamitsu Itoh, Osamu Ikenaga, Hideo Funakoshi, Norifumi Sato, Kenji Nakamizo, Masato Nomura, Yoshihiko Saito, Junji Nakao, Naoya Hayashi
Proceedings Volume 7122, 71220D (2008) https://doi.org/10.1117/12.801424
KEYWORDS: Particles, Mask making, Metals, Polonium, Liquids, Control systems, Sensors, Error analysis, Atomic force microscopy, Temperature sensors

Proceedings Article | 23 December 2004 Paper
Proceedings Volume 5639, (2004) https://doi.org/10.1117/12.581238
KEYWORDS: Adaptive optics, Telescopes, Stars, Mirrors, Wavefront sensors, K band, Laser systems engineering, Wavefronts, Deformable mirrors, Control systems

Proceedings Article | 25 October 2004 Paper
Proceedings Volume 5490, (2004) https://doi.org/10.1117/12.551942
KEYWORDS: Adaptive optics, Stars, Electrodes, Telescopes, Laser guide stars, Wavefronts, Wavefront sensors, Actuators, Wave propagation, Sensors

Showing 5 of 11 publications
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