Mr. Yuh-Hwa Li Profile

Yuh-Hwa Li

at Taiwan ROC

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Publications (3)

Proceedings Article | 1 December 2008 Paper

Optimizing integrated optical CD monitoring by floating pre-process variations in a complex multi-layer structure

Marlene Strobl, Lisa Huang, Allen Li, Ying Luo, Youxian Wen

Proceedings Volume 7140, 71400G (2008) https://doi.org/10.1117/12.804636

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Scatterometry, Metrology, Mathematical modeling, Data modeling, Thin films, Integrated optics, Process control, Optical properties

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Proceedings Article | 24 March 2006 Paper

ArF scanner performance improvement by using track integrated CD optimization

Jacky Huang, Shinn-Sheng Yu, Chih-Ming Ke, Timothy Wu, Yu-Hsi Wang, Tsai-Sheng Gau, Dennis Wang, Allen Li, Wenge Yang, Araki Kaoru

Proceedings Volume 6152, 615228 (2006) https://doi.org/10.1117/12.656104

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Sensors, Calibration, Error analysis, Scanners, Infrared sensors, Metrology, Wafer-level optics, Integrated optics

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Proceedings Article | 10 May 2005 Paper

Application of 3D scatterometry to contacts and vias at 90nm and beyond

Jacky Huang, Kelly Barry, Chih-Ming Ke, Burn Lin, Allen Li

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.601023

KEYWORDS: Semiconducting wafers, Scatterometry, Critical dimension metrology, Metrology, 3D metrology, Scanning electron microscopy, Etching, 3D applications, Cadmium, Inspection

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